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Piezo Stage / Nanopositioning System Provides Record Tavel Range of 1800 Microns

10-01-2008 01:27 PM CET | Science & Education

Press release from: PI (Physik Instrumente) L.P. Piezo Nano Positioning

A small sample of the large variety of PIHera® series piezo nanopositioning stages.  More than 20 different X, XY, Z and XYZ models are available with travel ranges from 50 µm to 1800 µm

A small sample of the large variety of PIHera® series piezo nanopositioning stages. More than 20 different X, XY, Z and XYZ models are available with travel ranges from 50 µm to 1800 µm

PI (Physik Instrumente) L.P., a leading manufacturer of piezo systems for nanopositioning and precision motion-control offers a flexure-guided piezo nanopositioning stage family with record travel ranges to 1.8 mm.

More Information & Datasheets:

New Stages Capture 200X Larger Areas than Conventional Stages
These precision closed-loop flexure-guided piezo stages can be used for scanning probe applications (surface metrology) and static positioning. Due to the long travel ranges they can scan areas more than 200 times larger than conventional piezo stages with typical ranges of 100x100 µm. Most PIHera® stages provide sub-nanometer resolution and even the 1.8 mm versions achieve 3 nm resolution in closed-loop operation. The compact size is achieved with a new, friction-free and extremely stiff flexure system, which also provides fast response and excellent guiding accuracy. Trajectory precision is in the low-nanometer range. High acceleration forces are provided by patented, long-life multilayer piezoelectric linear actuators. The ability to control motion with millisecond responsiveness and nanometer precision over long travel ranges makes PIHera® stages ideal for measuring and QA applications.

Capacitive Feedback Offers Greater Motion Linearity
The stages are equipped with non-contact capacitive-sensors and provide extremely linear motion with up to 99.98% accuracy and effective resolution in the sub-nanometer range. PI capacitive sensors are absolute-measuring, direct-metrology devices that boast very high bandwidth and exhibit no periodic errors.

Typical Applications
Surface Metrology, Quality Assurance, Scanning Probe Microscopy, Nanometrology, Interferometry, Nanopositioning, Nano-Alignment / Semiconductor Technology

Features & Advantages
- No Wear & Tear: Flexures, Actuators and Sensors are Maintenance-Free
- Longer Lifetime with Patented, Ceramic-Encapsulated Piezo Actuators
- X, XY, Z and XYZ Versions Available
- 50 to 1800 µm Travel Ranges, Nanometer Resolution
- Closed-Loop Digital & Analog Control for Up to 99.98 % Position Accuracy
- Vacuum-Compatible Versions
- Stiff and Compact Design for Millisecond Responsiveness
- Frictionless, Maintenance-Free, Precision Flexure Guiding System
- Direct-Metrology Sensors for Faster Servo Response

More information on piezo technology at

Flexible Controllers: High Speed, Digital and Analog Control
A variety of ultra-low-noise controllers with both digital and analog input provide fast communications and come with a wide selection of software tools.

About PI
PI is a leading manufacturer of precision motion-control equipment for photonics, bio-nanotechnology & semiconductor applications. PI has been developing and manufacturing standard & custom precision products with piezoceramic and electromagnetic drives for 35+ years. The company has been ISO 9001 certified since 1994 and provides innovative, high-quality solutions for OEM and research. PI is present worldwide with eight subsidiaries and total staff of 500.

PI (Physik Instrumente) L.P.
16 Albert St.
Auburn, MA 01501

USA / Canada:
East: David Rego
Tel: (508) 832-3456
Fax: (508) 832-0506

Midwest Joe McGonagle
(815) 793-3776

West David Steinberg
Tel: (949) 679-9191
Fax: (949) 679-9292

Germany: +49 (721) 4846-0
Italy: +39 (02) 665 011 01
France: +33 (1) 481 039 30
UK: +44 (1582) 764 334

Japan: +81 (6) 6304 5605
China +86 (21) 687 900 08

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