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Pfeiffer Vacuum introduces the new Dry Particle Counter ADPC 302

08-26-2013 05:40 PM CET | Industry, Real Estate & Construction

Press release from: Pfeiffer Vacuum

• Efficiently monitors particles inside FOUPs and FOSBs in semiconductor production
• Fast and dry method
• Completely automated and integrated into the process

Asslar, Germany, July 3, 2013. The ADPC 302 by Pfeiffer Vacuum is a unique in-process contamination management system for particle contamination monitoring in the semiconductor industry. This innovative product measures the number of particles in wafer transport carriers (Front Opening Unified Pod, FOUP and Front Opening Shipping Box, FOSB). The fully automated patented process localizes and counts particles from the carrier surfaces, including the door.
Submicrometer particles can cause defects that may lead to considerable yield loss. Even the smallest particles measuring 0.1 µm may damage the structure of semiconductor chips. Qualified by leading fabs, this system can be used for both the serial production as well as R&D analysis. The main applications are the carrier characterization, cleaning strategy optimization and cleaning quality check.
The dry process (Dry Particle Counter) of the ADPC shows clear benefits compared to the traditional wet method (Liquid Particle Counter). The main advantage of the dry process is that the particle measurement is completely automated. It is integrated in the production process and therefore does not require time outside the production period. Thanks to the fully automated measurement, the process does not require an additional operator. The test time is only seven minutes, meaning that the

ADPC 302 is four times as fast as traditional systems. It is possible to test eight transport carriers in one hour.
The ADPC 302 system for particle contamination monitoring complements the Pfeiffer Vacuum portfolio of contamination solutions for the semiconductor industry featured by the FOUPs molecular contamination analyzer APA 302 and the FOUPs regenerator APR 4300. All three systems comply with the SECS/GEM automation standard.

About Pfeiffer Vacuum
Pfeiffer Vacuum (Stock Exchange Symbol PFV, ISIN DE0006916604) is one of the world’s leading providers of vacuum solutions. In addition to a full range of hybrid and magnetically levitated turbo pumps, the product portfolio comprises backing pumps, measurement and analysis devices, components as well as vacuum chambers and systems. Ever since the invention of the turbo pump by Pfeiffer Vacuum, the company has stood for innovative solutions and high-tech products that are used in the Analytics, Industry, Research & Development, Coating and Semiconductor markets. Founded in 1890, today Pfeiffer Vacuum is active throughout the world. The company employs a workforce of some 2,300 people and has more than 20 subsidiaries. For more information, please visit www.pfeiffer-vacuum.com

Pfeiffer Vacuum
Berliner Str. 43
35614 Asslar
Germany

Pfeiffer Vacuum GmbH
Public Relations
Sabine Neubrand-Trylat
Tel.: +49 6441 802 1223
Fax: +49 6441 802 1500
Sabine.Neubrand@pfeiffer-vacuum.de
www.pfeiffer-vacuum.de

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