Nano-Positioning equipment with highest positioning accuracy
piezosystem jena is pleased to present, the piezo-electric nano positioning stage, and newly advanced design of the PX 100 CAP.
Without compromising the excellent accuracy, the travel range has been extended up to 100µm of motion in closed loop mode. For positioning control a high resolution capacitive feedback sensor is built in. The sensor is able to measure a deviation of the accuracy with sub-nm accuracy, and operates in a direct metrology fashion.
piezosystem jena is a world leading company in the development, design and engineering of piezo, piezo electrical actuator based positioning systems for micro- andnanopositioning and nano-automation. In addition to thepositioning stages, the company also offers optical fiber switches as well as the corresponding electronics.
piezosystem jena GmbH
Stockholmer Str. 12
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