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Objective Positioners Adapted To Meet Your Needs For Industrial Applications

01-28-2016 10:08 AM CET | Industry, Real Estate & Construction

Press release from: piezosystem jena GmbH

MIPOS 140 OEM Industrial Nanopositioner

MIPOS 140 OEM Industrial Nanopositioner

piezosystem jena has extended the objective positioner series MIPOS with two new industry products.
Typically objective positioners are firmly mounted directly onto a microscope. Piezosystem also introduces two new systems, which can be screwed on a machine or rail.

MIPOS 140:

Most installed lens positioners require an undesired extension to the optical axis. The distance between the lens and the sample is shortened. This can lead to collisions between the optics and the examined sample. Built with a very special design principle, the optical axis stays the same with the MIPOS 140. The position of the optical system remains unchanged after the installation and the focal point continues to be at the desired adjusted position. The MIPOS 140 OEM offers high-precision positioning accuracy for lenses with weights of up to 500 g. With an open loop travel range of 140 microns and 100 microns in closed loop operation, the MIPOS 140 reaches a resolution in the sub-nanometer range. The MIPOS can also be equipped with strain gauge, capacitive or alternative sensors for determining the position and correct for creep and hysteresis. The MIPOS 140 OEM also can be mounted upright in any position, for wafer inspection machines or used in optical benches horizontally and laser systems.

MIPOS 250 SG:

The objective positioner MIPOS 250 SG has a travel range of 250 microns in open loop operation and 200 microns in closed loop. With an extremely flat design the positioner has been constructed to be screwed to a flat surface. This surface can be an optical bench or a track within a machine. The high parallelism of the surface makes this MIPOS ideal for use in test and measurement, as well as in the semiconductor industry, such as mask inspection. Adapters are available for all standard microscope threads (Zeiss, Leica, Olympus, Nikon, Mitutoyo), thus making the MIPOS 250 universally applicable. The proven parallelogram principle guarantees a parallel motion without mechanical play and no affect on the optical axis. Fine focusing is also possible with high-resolution lenses, while drift and hysteresis are minimized when equipped with a strain gauge sensor in the MIPOS system.

Applications:

• Mask Inspection
Metrology and Test Engineering
• Industrial Metrology
• Optics
• Semiconductor Industry

Piezosystem Jena supplies, manufactures and develops for customers worldwide extreme precise driving and positioning systems based on piezoelectric actuators. These systems achieve sub-nanometer precision at a travel range up to 2 millimeters. Furthermore Piezosystem Jena extends the maximum travel of piezo stages with the product line Motion Control. These driving systems can position multiple centimeters with step motors.

piezosystem jena
2B Rosenfeld Drive
Hopedale, MA 01747
USA

Tel.: +1 508 634 66 88
Fax: +1 508 634 68 68
E-Mail: usa@piezojena.com

Do you have questions about the MIPOS 140, MIPOS 250 or you are looking for a solution for an industrial application? Our professional sales team is delighted to help you! Please call us or send an e-mail:

phone: +1 (508) 634-66 88
e-mail: info@piezojena.com

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