openPR Logo
Press release

Newport Announces the Industry’s First Family of Air Bearing Stages for 450mm Wafer Initiative - DynamYX® Datum TM 450 and 450GT

09-12-2012 03:39 PM CET | IT, New Media & Software

Press release from: Newport Corporation

/ PR Agency: Smith Miller Moore
Newport Announces the Industry’s First Family of Air Bearing

Newport Corporation, a worldwide leader in advanced motion control solutions, introduces the industry’s premier line of high-performance air bearing stages specifically designed for the 450mm semiconductor wafer initiative. The new DynamYX® DatumTM 450 and 450GT are based on Newport’s proven DynamYX 300-series wafer processing and inspection platforms with more than 1,000 worldwide installations. They are perfectly suited to handle the larger travel ranges, payloads, and increased throughput requirements of next-generation 450mm tools.

The DynamYX Datum 450 and 450 GT deliver high resolution, dynamic positioning of a wafer chuck or similar substrate in two orthogonal translation axes from a single-plane carriage. For added flexibility, a vertical Z-axis with tip/tilt function and a rotary axis for wafer offset correction can be added on the carriage beneath the wafer chuck. Other options are available for encoder and interferometer feedback, if required.

High efficiency linear motors minimize heat generation and apply drive forces through the center of the gravity of the stage resulting in superior long-term repeatability and dynamic performance. The maximum velocity reaches 1.5m/sec., with acceleration of 2G (Y axis) and 3G (X axis). With a rated payload of 20 kg, the new 300 Hz natural frequency stage features high accuracy (encoder feedback) at 50 nm (3 sigma) and high repeatability at 10 nm (3 sigma), making it ideal for tasks that require a high performing positioning stage for 450 mm wafers.

Business Development Manager, Walter Silvesky, notes, “The all-new DynamYX Datum 450 and 450 GT feature unique performance characteristics that are achieved in part due to the highly differentiated and proprietary construction using advanced ceramics (SiC) that yields lightweight
-more-

and incredibly rigid stage structures with high natural frequencies and exceptional thermal stability. A low-profile monolithic stage architecture with integrated pressure-vacuum air bearings provides unsurpassed stepping and scanning performance.”

Newport will be showcasing the DynamYX Datum 450 stage at SEMICON West 2012 at Moscone Center (San Francisco, CA), July 10-12. For more information, please stop by Newport’s South Hall booth #1507 for a demonstration, or visit our website for sales contact information in your region.

Newport Corporation is a leading global supplier of advanced-technology products and systems to customers in the scientific research, microelectronics manufacturing, aerospace and defense/security, life and health sciences and precision industrial manufacturing markets. Newport’s innovative solutions leverage its expertise in high-power semiconductor, solid-state and ultrafast lasers, photonics instrumentation, sub-micron positioning systems, vibration isolation, optical subsystems and precision automation to enhance the capabilities and productivity of its customers’ manufacturing, engineering and research applications. Newport is part of the Standard & Poor’s SmallCap 600 Index and the Russell 2000 Index.

Newport Corporation
1791 Deere Avenue
Irvine, CA 92606
Tel 949-863-3144
Fax 949-253-1800
www.newport.com

This release was published on openPR.

Permanent link to this press release:

Copy
Please set a link in the press area of your homepage to this press release on openPR. openPR disclaims liability for any content contained in this release.

You can edit or delete your press release Newport Announces the Industry’s First Family of Air Bearing Stages for 450mm Wafer Initiative - DynamYX® Datum TM 450 and 450GT here

News-ID: 234682 • Views: 832

More Releases from Newport Corporation

Newport Introduces Ultraviolet Beam Viewer
Newport Corporation, a worldwide leader in laser and photonic solutions that Make, Manage, and Measure Light®, introduces an ultraviolet (UV) beam viewer, the UVU-2A. By placing this optically clear device into the path of a UV laser, beam characteristics such as laser mode structure, beam shape, and beam alignment can be easily observed. The optical glass of the clean-room-compatible UV beam viewer will glow white green when exposed to
Newport Introduces Long-Lived Deep UV Excimer Laser Mirrors
Newport Corporation, a worldwide leader in laser and photonic solutions that Make, Manage, and Measure Light®, introduces long-lived deep ultraviolet (UV) excimer laser mirrors with projected lifetimes greater than 30 billion pulses when used in the proper photocontamination controlled environment. The advanced new mirrors feature all dielectric high reflector coatings to minimize absorption and maximize reflected energy at 193 nm. The high energy laser mirrors are designed with Excimer-grade UV
Newport Introduces 918D-ST Series Wand Photodiode Sensors
Newport Corporation, an industry leader in optical power measurement, introduces the most advanced 918D-ST series wand photodiode sensors available. The new design features a thin profile wand detector in a sturdy metal housing with integrated calibration-data storage and an automatic OD3 attenuator On/Off position sensor. Similar to Newport’s family of 918D series detectors, the new 918D-ST series features built-in temperature sensing electronics to compensate for temperature variation.
Newport Announces New PV Wafer Testing Capability
• The Technology & Applications Center’s Photovoltaic Lab now offers solar wafer testing on cells up to 156 mm x 156 mm. Newport Corporation, a worldwide leader in laser and photonic solutions that Make, Manage and Measure Light®, is pleased to announce expanded capabilities that include solar wafer testing and calibration for bare cells up to 156 mm x 156 mm. Newport’s Technology & Applications Center’s Photovoltaic (TAC-PV)

All 5 Releases


More Releases for DynamYX

Trend to Adopt Digital Pathology Solutions and Opting multiple vendors or Demand …
The research report "Digital Pathology Market by product (scanners, software solutions/applications, communication systems, storage systems), by application (research & academics, clinical research & toxicology, clinical diagnostics), by usage (human pathology, animal pathology), by end user (hospitals, reference labs & pathologists, pharmaceutical companies, teaching & research institutes, others) and geography – global/region/country forecast to 2026." Glance our 200 slides market research and competitive intelligence research report, 25 Tables and 65 Figures and
Global Digital Pathology Market | Industry Crucial Players - Leica Biosystems Im …
Advancement in therapeutics development of critical medical conditions such as cancer necessitates adoption of advanced, image based platform for apt diagnosis and clinical research, thus reflecting favorably on digital pathology market. Further, large scale adoption of digital pathology to offset limitations associated with traditional diagnostic mechanisms is a potent growth enabler. Market Research Reports Search Engine (MRRSE) in its recent report addition titled, ‘Digital Pathology Market – Global Industry Analysis, Size,