Semiconductor Cleaning and Etching Gases Research: CAGR of 7.37% during the forecast period

QY Research Inc. (Global Market Report Research Publisher) announces the release of 2025 latest report "Semiconductor Cleaning and Etching Gas- Global Market Share and Ranking, Overall Sales and Demand Forecast 2026-2032". Based on current situation and impact historical analysis (2020-2024) and forecast calculations (2026-2032), this report provides a comprehensive analysis of the global Semiconductor Cleaning and Etching Gas market, including market size, share, demand, industry development status, and forecasts for the next few years.

The global market for Semiconductor Cleaning and Etching Gas was estimated to be worth US$ 2819 million in 2025 and is projected to reach US$ million, growing at a CAGR of % from 2026 to 2032.

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Semiconductor Cleaning and Etching Gases Market Summary

According to the new market research report "Global Semiconductor Cleaning and Etching Gases Market Report 2025-2031", published by QYResearch, the global Semiconductor Cleaning and Etching Gases market size is projected to grow from USD 1,821 million in 2024 to USD 3,006 million by 2031, at a CAGR of 7.37% during the forecast period.

Semiconductor cleaning gases are specialized process gases used to remove residual particles, organic matter, metallic contaminants, oxides, and chemical reaction byproducts from wafer surfaces. They are widely used in critical front-end processes such as pre-lithography cleaning, post-etching cleaning, pre-deposition surface activation, atomic layer deposition (ALD) pretreatment, and dry resist stripping. Typical cleaning gases include O2, O3, NF3, CF4, C3F8, H2, H2O Plasma, ClF3, and F2. Through plasma or high-temperature reactions, they form functional free radicals, achieving the removal of surface contaminant layers and selective protection of underlying material structures. The stability, purity (up to 99.9999%), and reaction controllability of cleaning gases directly affect yield and defect density, making them one of the core materials for improving yield at advanced nodes (7 nm, 5 nm, 3 nm). Semiconductor etching gases are key process materials used in the front-end processing of wafers to selectively remove materials under a mask through mechanisms such as chemical etching, physical ion bombardment (Reactive Ion Etching), and deep silicon etching (DRIE), forming nanoscale patterns, trenches, vias, and three-dimensional structures.

Market Drivers:

1. Advanced Processes (EUV, FinFET, GAA) Dramatically Increase Surface Cleanliness Requirements

As process technology advances from 10nm to 7nm to 5nm to 3nm, the tolerance for wafer surface defects approaches zero. Any residual organic matter, metal ions, or oxide films can lead to linewidth shifts, pattern collapse, or short-circuit/open-circuit defects. The increased number of EUV lithography layers and thinner photoresist necessitate higher requirements for post-etching cleaning and damage resistance, driving rapid growth in demand for efficient, low-damage cleaning gases such as ClF3, O3, and NF3. High aspect ratio structures in 3D structures (FinFET, GAA, 3D NAND) are more susceptible to residual contamination, further increasing the amount of cleaning gases used and process complexity.

2. The increasing number of 3D NAND layers drives a significant increase in cleaning and removal volumes.

3D NAND has progressed from 96 layers to 176 and 232 layers, with a future target of 300+ layers. The number of etching operations and post-etching cleaning tasks are increasing exponentially. The large amount of polymer residue generated by deep trench etching requires highly reactive cleaning with O2/NF3 plasma and ClF3. As the number of stacked layers increases, post-etching cleaning becomes one of the largest gas-consuming steps in the 3D NAND manufacturing cycle, leading to a greater demand for NF3, F2, and H2/O2 mixtures.

3. Improved manufacturing yield and defect control become core competitive advantages for wafer fabs.

Wafer fabs (such as TSMC, Samsung, SK Hynix, and Yangtze Memory) are increasingly regarding "cleaning" as one of the most important yield-locking steps in their advanced processes. With the significant increase in chip costs, any defects caused by insufficient cleaning can amplify losses, prompting wafer fabs to increase the number of cleaning cycles, improve cleaning intensity, and adopt new cleaning gases with higher purity and faster reaction rates. Defect density management at advanced nodes is driving a continuous increase in the overall usage and value per wafer of high-end cleaning gases.

The report provides a detailed analysis of the market size, growth potential, and key trends for each segment. Through detailed analysis, industry players can identify profit opportunities, develop strategies for specific customer segments, and allocate resources effectively.

The Semiconductor Cleaning and Etching Gas market is segmented as below:
By Company
SK Materials
Kanto Denka Kogyo
Resonac
Linde Group
Peric
Hyosung
Taiyo Nippon Sanso
Merck KGaA
Mitsui Chemical
Central Glass
Haohua Chemical Science & Technology
Shandong FeiYuan
Messer Group
Air Liquide
Huate Gas

Segment by Type
Fluoride Gas
Chloride Gas
Others

Segment by Application
Semiconductor Cleaning
Semiconductor Etching

Each chapter of the report provides detailed information for readers to further understand the Semiconductor Cleaning and Etching Gas market:

Chapter 1: Introduces the report scope of the Semiconductor Cleaning and Etching Gas report, global total market size (valve, volume and price). This chapter also provides the market dynamics, latest developments of the market, the driving factors and restrictive factors of the market, the challenges and risks faced by manufacturers in the industry, and the analysis of relevant policies in the industry. (2021-2032)
Chapter 2: Detailed analysis of Semiconductor Cleaning and Etching Gas manufacturers competitive landscape, price, sales and revenue market share, latest development plan, merger, and acquisition information, etc. (2021-2026)
Chapter 3: Provides the analysis of various Semiconductor Cleaning and Etching Gas market segments by Type, covering the market size and development potential of each market segment, to help readers find the blue ocean market in different market segments. (2021-2032)
Chapter 4: Provides the analysis of various market segments by Application, covering the market size and development potential of each market segment, to help readers find the blue ocean market in different downstream markets.(2021-2032)
Chapter 5: Sales, revenue of Semiconductor Cleaning and Etching Gas in regional level. It provides a quantitative analysis of the market size and development potential of each region and introduces the market development, future development prospects, market space, and market size of each country in the world..(2021-2032)
Chapter 6: Sales, revenue of Semiconductor Cleaning and Etching Gas in country level. It provides sigmate data by Type, and by Application for each country/region.(2021-2032)
Chapter 7: Provides profiles of key players, introducing the basic situation of the main companies in the market in detail, including product sales, revenue, price, gross margin, product introduction, recent development, etc. (2021-2026)
Chapter 8: Analysis of industrial chain, including the upstream and downstream of the industry.
Chapter 9: Conclusion.

Benefits of purchasing QYResearch report:

Competitive Analysis: QYResearch provides in-depth Semiconductor Cleaning and Etching Gas competitive analysis, including information on key company profiles, new entrants, acquisitions, mergers, large market shear, opportunities, and challenges. These analyses provide clients with a comprehensive understanding of market conditions and competitive dynamics, enabling them to develop effective market strategies and maintain their competitive edge.

Industry Analysis: QYResearch provides Semiconductor Cleaning and Etching Gas comprehensive industry data and trend analysis, including raw material analysis, market application analysis, product type analysis, market demand analysis, market supply analysis, downstream market analysis, and supply chain analysis.

and trend analysis. These analyses help clients understand the direction of industry development and make informed business decisions.

Market Size: QYResearch provides Semiconductor Cleaning and Etching Gas market size analysis, including capacity, production, sales, production value, price, cost, and profit analysis. This data helps clients understand market size and development potential, and is an important reference for business development.

Other relevant reports of QYResearch:
Global Semiconductor Cleaning and Etching Gas Market Research Report 2026

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