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Excimer Lasers for DUV Lithography Market Size, Revenue Share, Insights & Future Outlook

11-21-2025 12:30 PM CET | Advertising, Media Consulting, Marketing Research

Press release from: Valuates Reports

Excimer Lasers for DUV Lithography Market

The global market for Excimer Lasers for DUV Lithography was valued at US$ million in the year 2024 and is projected to reach a revised size of US$ million by 2031, growing at a CAGR of %during the forecast period.

North American market for Excimer Lasers for DUV Lithography is estimated to increase from $ million in 2024 to reach $ million by 2031, at a CAGR of % during the forecast period of 2025 through 2031.

Asia-Pacific market for Excimer Lasers for DUV Lithography is estimated to increase from $ million in 2024 to reach $ million by 2031, at a CAGR of % during the forecast period of 2025 through 2031.

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The major global manufacturers of Excimer Lasers for DUV Lithography include Gigaphoton, Cymer(ASML), Beijing RSLaser Opto-Electronics Technology, Optosystems, Coherent, etc. In 2024, the world's top three vendors accounted for approximately % of the revenue.

Excimer Lasers for DUV Lithography Market Major Factors

The excimer lasers for deep ultraviolet (DUV) lithography market is driven by their critical role in semiconductor fabrication processes. Excimer lasers provide the precise light source required for advanced photolithography, enabling production of smaller, more efficient chips. As demand for high-performance consumer electronics, automotive electronics, and data center processors grows, excimer lasers remain indispensable. Their ability to deliver consistent, high-power output ensures accuracy and throughput in mass manufacturing. Ongoing investments in semiconductor fabs worldwide further boost adoption. Despite advances in extreme ultraviolet (EUV), excimer-based DUV systems continue to dominate established process nodes, ensuring sustained relevance in chip production.

Excimer Lasers for DUV Lithography Market Trends

A major trend is the continued reliance on excimer lasers for immersion DUV lithography. This approach enhances resolution at lower cost compared to EUV, making it widely used for mature nodes in mass-market applications such as automotive and IoT devices.

Another trend is the integration of advanced gas mixtures and optics to improve excimer laser efficiency and lifespan. Manufacturers are investing in innovations that enhance power stability, reduce downtime, and lower operational costs for semiconductor fabs.

Supply chain diversification is also shaping demand, with countries building domestic semiconductor ecosystems. This trend increases orders for excimer lasers as fabs scale production capacity across multiple regions.

Excimer Lasers for DUV Lithography Market Share

The market is dominated by specialized photolithography equipment suppliers with expertise in high-precision laser technologies. Firms offering long-term service contracts and system upgrades strengthen their competitive positioning.

Regionally, Asia-Pacific leads due to concentration of semiconductor manufacturing. North America shows strong adoption through advanced R&D centers, while Europe supports demand with industrial and automotive chip production. These regional drivers define competitive market distribution.

By Type
• KrF Excimer Lasers
• ArF Excimer Lasers

By Application
• Image Sensors
• Power ICs
• MEMS
• Analog ICs
• Logic ICs

Key Companies
Gigaphoton, Cymer(ASML), Beijing RSLaser Opto-Electronics Technology, Optosystems, Coherent

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