EUV Mask Defect Inspection Equipment Market Share Driven by Advanced Semiconductor Node Adoption | Valuates Reports

EUV Mask Defect Inspection Equipment Market Size

The global market for EUV Mask Defect Inspection Equipment was valued at US$ 1645 million in the year 2024 and is projected to reach a revised size of US$ 3863 million by 2031, growing at a CAGR of 13.2% during the forecast period.

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The EUV Mask Defect Inspection Equipment Market is experiencing strong market growth as semiconductor manufacturers increasingly adopt extreme ultraviolet (EUV) lithography for cutting-edge chip production. Rising demand for smaller, faster, and higher-performing integrated circuits in consumer electronics, automotive, and IT sectors is shaping the overall market size. Key market trends include the need for precise defect detection, enhanced yield management, and process optimization, all of which drive the deployment of sophisticated inspection equipment.

Among the type segments, 5-7nm process inspection equipment currently holds the largest market share, reflecting widespread adoption in advanced node fabrication. Meanwhile, 3nm and below process equipment is witnessing rapid market growth, driven by the transition to next-generation nodes requiring extreme precision and high-resolution defect detection. Both segments contribute to maintaining the integrity of EUV mask patterns and ensuring consistent chip quality.

In terms of applications, the fab segment dominates the market share, as high-volume semiconductor production necessitates comprehensive defect inspection and quality assurance at wafer fabrication sites. The mask shop segment is experiencing notable market growth, supported by increasing complexity of mask design, higher resolution requirements, and the need to prevent defects before wafer exposure. Together, these applications ensure reliability throughout the EUV lithography supply chain.

Leading companies such as Lasertec, KLA-Tencor, and Advantest hold the largest market share, leveraging advanced optical inspection technologies, automation, and process integration capabilities. These companies are also driving market growth through continuous innovation in detection resolution, throughput, and defect classification. Investments in R&D, strategic partnerships with semiconductor manufacturers, and expansion of regional service capabilities strengthen their market positions and influence industry trends.

Regionally, North America dominates production and consumption, fueled by technological leadership and significant investments in domestic semiconductor fabs. Asia-Pacific, particularly Japan, China, South Korea, and Taiwan, is a key hub for both production and adoption due to advanced manufacturing infrastructure and robust supply chain networks. Europe remains a strong contributor through precision equipment development and industrial expertise. Emerging regions such as India, Mexico, and Brazil are gaining importance as semiconductor demand grows. The market forecast indicates sustained adoption of next-generation EUV nodes, innovation in inspection technology, and expansion of global manufacturing capacity, shaping future market trends and driving continued market growth.

By Type
• 5-7nm Process
• 3nm and Below Process

By Application
• Mask Shop
• Fab

Key Companies
Lasertec, KLA-Tencor, Advantest

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