Nitiride and Silicon — analysis systems in miniature format

How can molecules or cells be analysed fast and precise? And how are instruments manufactured that allow studying each single molecule? iX-factory GmbH fabricates Biochips out of glass and silicon with integrated nanomembranes out of nitride. These layers can have a thickness of subnanometers up to several hundred nanometers. Using state-of-the-art etching technologies allows iX-factory to create different structures on the membranes, which allow the detection / analysis of single cells, cell particles, DNS or specific molecules. The membranes are used in medicical and biotechnological devices as well as sensors. But how are membranes produced which are only a few nanometers thick?

On a substrate wafer, which can be out of glass or silicon, a 50 nanometers thick nitride layer is grown by a furnace process. To create membranes, the nitride layer is etched away from the backside of the wafer. This can be done either by dry or wet etching. During the etching process holes can be transferred in the nitride membrane of a few nanometers in diameter with different geometries or tapered patterns can be created. The structures are fabricated in the interior of a hollow body and can be filled with liquids or gases. A perforated membrane can function as a diffusion barrier for cells of different sizes. On the nitride surface layers of metal or insulators can be structured layer for layer. The surfaces can be immobilised and many tests as well as analysis can be implemented in the smallest dimension. Single prototypes as well as complete batches can be implemented by the experts.

On 25 + 26 September 2013 iX-factory GmbH will be present at MICRO | NANO | MEMS Congress in Birmingham, UK. Find out about multidisciplinary technologies based on glass and silicon and get informed about MEMS Foundry Service, Design/Project Work, Prototyping and Batch Production for your idea. If you want to visit the congress register online for free at www.micronanomems.com. iX-factory GmbH welcomes you in Hall 3, Booth G32.

iX-factory is an innovative technical service provider in microsystems and nanotechnology with customised solutions for your needs. And just when it gets complicated, we are adaptable and reliable to take care of the project implementation. The service portfolio consists of: MEMS Foundry Service, Prototyping and Batch Production. Besides the team holds expertise on microfluidics and integrated optics, which can be designed and constructed on glass and/or silicon substrates. The products are manufactured in our own clean room. The systems and processes are structured flexible that individual products, as well as batches can be realized on different substrates like glass and silicon. Individual and customer-oriented solutions are always our highest priority.

iX-factory GmbH
Konrad-Adenauer-Allee 11
44263 Dortmund
Germany
Phone +49 231 47730 580
info@ix-factory.de
www.ix-factory.com

This release was published on openPR.