Press release
The quality-guarantee professional TMP Controller Repair Service | HYESUNGTECH
HYESUNGTechsetsa focus on professional maintenance and repair service of any vacuum pumps, especially the most major global brands of TMP repair. And HYESUNG Tech is providing direct service ofturbo pump salesmainly used for semiconductor equipment.
And HYESUNGTech is expanding its professional repair service to TMP Controller repairservice that repairs almost all of the major global brands and products.
HYESUNGTECH deals the major global brands of TMP Controller for maintenance and repair:
The TMP Controller products that HYESUNG Tech can provide the maintenance and repair service are RF Generator, Power Supply, Vacuum Gauge, Helium Leak Detector and Flow Controller.
■RF Generator:
AE MDX SPARC-LE HR CHOPPER, AE PEI' 10K RF GENERATOR, AE REG1250, AE RFG2000 2V, AE RFG3000, AE RFG3001, AE ASPECT5013, AE RFXI15500, AE RFG3000, AE RFG3001
ENI OEM12A RF GENERATOR, ENI OEM25B RF GENERATOR, ENI GHW-50 SERIES RE GENERATOR, ENI ACG SERIES RF GENERATOR
KYOSAN RF GENERATOR RFK3OZCPS1 3KW, JFKSOZD TE2 5KW, RFK100ZD WT1, KYOSAN MATCHING BOX
AD-TEC RF PLASMA GENERATOR AX-100011, AXS000W, AX-20000111, AX-10000W AKT, AX-15000W AKT
HUTTINGER RF GENERATOR 1.6KW
RFPP LF-5
COMDEL CLF5000
MBK50-P52 RE GENERATOR AUTO MATCHING BOX
■Power Supply:
MKN-152-3S4-PS MICROWAVE
PFEIFFER TCPO40
OMRON BH100PCW
METAL HALIDE LAMP
APPLIED MATERIALS 24V DC
FUSION LIGHT HAMMER UV, FUSION P300MQ
AE PINNACLE 8/15KW, AE PINNACLE 10/12KW, AE MDX L-12M
UV POWER SUPPLY
KYOSAN HPK15 DC, HV LAMP
BERTAN HIGH VOLTAGE POWER SUPPLY
GUSTAV KLEIN, DELTRON
SIEMENS, PLUS POWER SUPPLY SL10
■Vacuum Gauge:
IMR265, TPR265, PKR251, IKR251, MPG400
TPG262 GAUGE CONTROLLER, TPG300 GAUGE CONTROLLER
IMG300 GAUGE CONTROLLER
■Helium Leak Detector:
ULVAC HELIUM LEAK DETECTOR
HELEN HELIUM LEAK DETECTOR
PFEIFFER HELIUM LEAK DETECTOR
ADIXEN(ALCATEL) HELIUM LEAK DETECTOR
LEYBOLD HELIUM LEAK DETECTOR
■Flow Controller:
ENTEGRIS FLOW CONTROLLER
MALEMA FLOW CONTROLLER
BROOKS(CELERITY) FLOW CONTROLLER
PARKER FLOW CONTROLLER
HORIBA FLOW CONTROLLER
Korea
HYESUNG Tech Co., Ltd. is doing its major business that is turbo pump repair in addition to the purchase of used turbo pump and sales of refurbished turbo pump for the semiconductor equipment.
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