CyberOptics Semiconductor To Demo WaferSense® Airborne Particle Sensor at Semicon West 2011

CyberOptics Semiconductor will demo its new WaferSense® Airborne Particle Sensor (cyberopticssemi.com/products/wafersense/aps) along other WaferSense wireless metrology devices including the Auto Leveling System and Auto Vibration System, during Semicon West 2011 in Booth No. 2406. CyberOptics’ WaferSense family of products offers a wireless set of measurement solutions for leveling, gapping and teaching semiconductor equipment.

Introduced in January 2011 after a year of beta testing and research, the WaferSense Airborne Particle Sensor (APS) is the only semiconductor sensor of its kind to identify particle sources in tool. Shaped like a wafer, the APS moves through semiconductor process equipment and automation material handing systems to monitor airborne particles, reporting real-time information that allows engineers to efficiently validate wafer contamination and identify potential yield issues.

How it Works
The Airborne Particle Sensor uses a fan to pull non-corrosive gas or air through a channel as a laser illuminates the air/gas stream while particles scatter light onto the sensors photodiode. Compatible with front-ends, coater/developer tracks, deposition and etch equipment, the APS has the ability to detect particles as small as 0.1 um. The automation-friendly semiconductor sensor doesn't require engineers to open chambers or expose ultra-clean process areas to the environment. The sensor can detect particles in real-time without opening the tool.

Using the Airborne Particle Sensor’s companion software ParticleView™, fab engineers can collect and display particle data wirelessly to see the effect of adjustments in real time, speeding equipment qualification and setup. Particle data can be recorded to compare past to present operations as well as one tool to another to conduct machine-to-machine trend analysis of particle conditions and to establish process control and conduct process improvement.

The Airborne Particle Sensor is available in 200 mm, 300 mm (and 450mm special order) factors. For more information on the Airborne Particle Sensor, please refer to our web site at http://www.cyberopticssemi.com/products/wafersense/aps/ or contact sales at (503) 495-2200.

For more information on CyberOptics’ complete line of WaferSense products including the Auto Gapping System, Auto Teaching System and Auto Leveling System, please refer to: http://www.cyberopticssemi.com/products/wafersense .

About CyberOptics Semiconductor, Inc.
CyberOptics Semiconductor develops wireless products that seamlessly measure critical parameters in semiconductor fabrication processes and equipment. The company’s pioneering WaferSense® line includes wireless metrology devices for vibration, leveling, gapping, robot teaching and sensing airborne particles in semiconductor process equipment. The company is the largest producer of reflective wafermapping sensors and a leading provider of frame grabber machine vision boards under its HAMA Sensors™ and Imagenation™ brands. CyberOptics Semiconductor is a subsidiary of CyberOptics Corp. (Nasdaq:CYBE), one of the world's leading providers of process yield and throughput improvement solutions for the electronic assembly and semiconductor fabrication industries. For information, visit http://www.cyberopticssemi.com/, e-mail CSsales@cyberoptics.com or call 800-366-9131.

CyberOptics Semiconductor, Inc.
9130 SW Pioneer Court, Suite D
Wilsonville, OR 97070
www.CyberOpticsSemi.com
CSsales@cyberoptics.com
800-366-9131

This release was published on openPR.