Electrostatic Chucks for Wafer Market Share of Top 3 and Top 5 Manufacturers (SHINKO, TOTO, Creative Technology Corporation)

A chuck is a specialized type of clamp used to hold an object with radial symmetry, especially a cylinder. In drills and mills it holds the rotating tool whereas in lathes it holds the rotating workpiece. On a lathe the chuck is mounted on the spindle which rotates within the headstock. For some purposes (such as drilling) an additional chuck may be mounted on the non-rotating tailstock.

In this report, the Global Electrostatic Chucks for Wafer Market is valued at USD XX million in 2018 and is expected to reach USD XX million by the end of 2025, growing at a CAGR of XX% between 2018 and 2025.

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Many chucks have jaws, (sometimes called dogs) that are arranged in a radially symmetrical pattern like the points of a star. The jaws are tightened up to hold the tool or workpiece. Often the jaws will be tightened or loosened with the help of a chuck key, which is a wrench-like tool made for the purpose Many jawed chucks, however, are of the keyless variety, and their tightening and loosening is by hand force alone. Keyless designs offer the convenience of quicker and easier chucking and unchucking, but have lower gripping force to hold the tool or workpiece, which is potentially more of a problem with cylindrical than hexagonal shanks. Collet chucks, rather than having jaws, have collets, which are flexible collars or sleeves that fit closely around the tool or workpiece and grip it when squeezed.

Methods of Electrostatic Chucks for Wafer Market:

Mounting of drill chucks
A threaded arbour may screw into the chuck body.
A tapered arbour (with a self-holding taper) may be pressed into the chuck body.
Removal and insertion may involve various tools or methods:
Tools: vies (especially with a wooden jig or soft jaw made for this purpose); hammer (especially nonmarring hammer or rubber mallet); arbor press or shop press (the latter two require skill to avoid damaging the chuck).
Methods: heating (via heat guns, blow torches, or ovens) and cooling (via kitchen freezers, winter weather, or decompression of compressed air or nitrogen).

A drill chuck may have a hollow body that threads directly onto a lathe's threaded spindle nose. (These are fairly rare, especially nowadays.)
Mounting of large jawed chucks

Taper spindle nose with threaded retention. The retainer ring is wrenched with a spanner wrench.A backplate with threads may screw onto a threaded spindle nose (for lathe work) or onto an adapter plate with the same nose, to be mounted on the table of milling machines or surface grinding machines. This "threaded spindle nose" type of mounting was the typical method in the 19th century through 1930s. It is simple and useful, but the degree of control of concentricity is not quite good enough to be foolproof for high-speed, high-precision work (high precision can be achieved, but the time and skill involved in the setups makes it a poor choice now that better options exist, such as the cam-lock spindle noses described below). Threaded spindle noses are still built on new machine tools, but only of the low-end variety (hobbyist, least-expense MRO, etc.). High-capital manufacturing (where high upfront expense yields lowest possible unit expense for mid- to high-volume part counts of high-precision parts) has moved away from this type of mounting. The exact-adjust (Set-Tru) concept is one way to chase high concentricity on threaded spindle noses with some relative degree of ease.

A common solution on smaller lathes is a broad flanged end to the spindle with a concentric raised circular register matching a recess in the chuck or its backplate. The register is normally shallow and parallel sided and a light push fit in the female register of the chuck. The chuck is held in place with bolts through clearance holes that do not affect the alignment which is entirely provided by the register. This arrangement has excellent repeatability but is slow in a production situation.

A backplate with a female (self-releasing) taper may seat on the matching male taper of the taper(ed) spindle nose (for lathe work) or of an adapter plate with the same nose, to be mounted on a table. This system improves the repeatability of the mounting concentricity down to a very small total indicated runout (TIR) value. Subtypes:

The chuck may be held against the taper with a threaded retainer ring (large thin nut), typically wrenched with a spanner wrench of the pin or hook variety. The peak of popularity for building this type of spindle nose was the 1940s and 1950s.

The chuck may be held against the taper with cam-lock posts that wedge into a stuck-fast position. Industry-standard spindle nose designs allow wide interchangeability. This cam lock spindle nose system replaced the earlier systems on most machine tools in the 1960s.

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Mounting of collet chucks

For collet chucks mounted on backplates, all of the same methods above are applicable.

Many lathes that run collet chucks have dedicated collet-closer setups whereby there is no backplate, and the spindle nose contains the female taper for either the collet's male outer taper, or a sleeve that will hold it. A hollow drawbar passes back through the headstock to its back side, where a closer mechanism is mounted. The latter allows easy, rapid opening and closing of the collet. The drawbar's inner diameter determines the through-the-spindle bar diameter capacity of the lathe. Some collet-closer systems even allow opening and closing without stopping the spindle rotation. The closer on a manual lathe is either lever-style or handwheel-style. The closer on a CNC lathe is powered (electric, hydraulic, or pneumatic), and it may be controlled by various means: a foot pedal that the operator steps on when desired; a line in the program (for opening and closing under program control); or a button on the control panel.

National and international standards are used to standardize the definitions, requirements, and test methods used for the performance evaluation of chucks. Selection of the standard to be used is an agreement between the supplier and the user and has some significance in the design of the chuck. In the United States, ASME has developed the B5.60 Standard entitled Workholding Chucks: Jaw-Type Chucks, which establishes requirements and methods for specifying and testing the performance of Workholding chucks used primarily in turning operation

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