Global Semiconductor Waste Gas Abatement Systems Market to Reach US$ 2.72 Billion by 2031, Driven by Semiconductor Expansion and Stringent Environmental Regulations | QY Research

Market Overview -

The global Semiconductor Waste Gas Abatement Systems market was valued at US$ 1,433 million in 2024 and is projected to reach US$ 2,717 million by 2031, growing at a robust CAGR of 9.1% during the forecast period 2025-2031.

According to QY Research, the newly released report titled "Semiconductor Waste Gas Abatement Systems Market Share and Ranking, Overall Sales and Demand Forecast 2025-2031" provides an in-depth assessment of market dynamics, technology trends, competitive positioning, and regional growth opportunities shaping this critical segment of the semiconductor manufacturing ecosystem.

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Industry Background and Environmental Significance

Semiconductor manufacturing processes rely heavily on specialty gases that are toxic, flammable, corrosive, and environmentally hazardous. These gases-used in plasma etching, chemical vapor deposition (CVD), atomic layer deposition (ALD), epitaxy (EPI), and ion implantation-must be treated before release to meet strict regulatory thresholds.

Semiconductor waste gas abatement systems are designed to reduce harmful exhaust gases below threshold limit values (TLVs) through advanced treatment technologies such as combustion-wash, dry, wet, catalytic, and plasma-wet systems, or hybrid solutions combining multiple methods. By enabling safe exhaust discharge, these systems play a vital role in ensuring regulatory compliance, worker safety, and sustainable semiconductor manufacturing.

Key Market Growth Drivers

Rapid Expansion of the Semiconductor Industry
The accelerating demand for semiconductors across electronics, automotive, data centers, artificial intelligence, and renewable energy applications is driving large-scale investments in new fabs and capacity expansions worldwide. Each new fabrication line increases the need for advanced waste gas abatement systems, directly supporting market growth.

Stringent Environmental Regulations
Governments across Asia-Pacific, Europe, and North America are enforcing increasingly strict environmental and occupational safety standards. Compliance with emissions regulations has become mandatory for semiconductor manufacturers, significantly boosting demand for high-performance abatement equipment.

Focus on Sustainable Manufacturing
Leading semiconductor manufacturers are prioritizing ESG goals and carbon reduction strategies. Advanced abatement systems that improve destruction efficiency, reduce byproducts, and support greener operations are gaining strong traction.

Technology Trends
The market is witnessing continuous innovation in high-efficiency abatement technologies, including:
► Enhanced combustion and catalytic systems for improved destruction rates
► Plasma-wet hybrid solutions for complex gas mixtures
► Smart monitoring and automation for real-time performance optimization
► Modular and energy-efficient designs to reduce operating costs

These advancements help fabs manage increasingly complex process chemistries while maintaining uptime and safety.

Competitive Landscape
The global market is moderately concentrated, with a mix of established international suppliers and fast-growing regional players. Key companies profiled in the report include
► Ebara
► Atlas Copco (Edwards and CSK brands)
► GST (Global Standard Technology)
► Shanghai Shengjian Technology
► Busch Group
► DAS Environmental Expert
► CS Clean Solutions
► Kanken Techno
► CECO Environmental
► Resonac (formerly Showa Denko)

Competition centers on abatement efficiency, system reliability, footprint reduction, lifecycle cost, and after-sales service, as fabs demand increasingly customized solutions for advanced process nodes.

Regional Insights
► Asia-Pacific dominates the global market, supported by large-scale semiconductor manufacturing hubs in China, Taiwan, South Korea, Japan, and Southeast Asia. Continuous investments in logic, memory, and foundry capacity make the region the largest and fastest-growing market.
► North America and Europe also represent significant demand, driven by semiconductor reshoring initiatives, advanced node development, and strong regulatory oversight on emissions and workplace safety.

Market Segmentation Highlights

By Type
► Combustion-wash Type
► Dry Type
► Catalytic Type
► Wet Type
► Plasma-wet Type
► Others

By Application
► Plasma Etching
► CVD and ALD
► EPI
► Ion Implantation
► Others

By Region
► North America
► Europe
► Asia Pacific
► South America
► Middle East & Africa

Market Outlook
Looking ahead, the semiconductor waste gas abatement systems market is expected to benefit from:
► Continued global semiconductor fab construction
► More complex process chemistries at advanced nodes
► Tightening environmental and safety regulations
► Rising adoption of integrated and intelligent abatement platforms

As sustainability becomes a core requirement rather than an option, waste gas abatement systems will remain mission-critical infrastructure for semiconductor fabs worldwide.

About the Report
The report offers:
► Global and regional market size and forecast through 2031
► Company market share and competitive ranking analysis
► Detailed segmentation by type and application
► Insights into regulatory trends, technology evolution, and growth drivers
► Strategic intelligence for equipment suppliers, fab operators, and investors

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Table of Content:

1 Market Overview
1.1 Semiconductor Waste Gas Abatement Systems Product Introduction
1.2 Global Semiconductor Waste Gas Abatement Systems Market Size Forecast
1.2.1 Global Semiconductor Waste Gas Abatement Systems Sales Value (2020-2031)
1.2.2 Global Semiconductor Waste Gas Abatement Systems Sales Volume (2020-2031)
1.2.3 Global Semiconductor Waste Gas Abatement Systems Sales Price (2020-2031)
1.3 Semiconductor Waste Gas Abatement Systems Market Trends & Drivers
1.3.1 Semiconductor Waste Gas Abatement Systems Industry Trends
1.3.2 Semiconductor Waste Gas Abatement Systems Market Drivers & Opportunity
1.3.3 Semiconductor Waste Gas Abatement Systems Market Challenges
1.3.4 Semiconductor Waste Gas Abatement Systems Market Restraints
1.4 Assumptions and Limitations
1.5 Study Objectives
1.6 Years Considered
2 Competitive Analysis by Company
2.1 Global Semiconductor Waste Gas Abatement Systems Players Revenue Ranking (2024)
2.2 Global Semiconductor Waste Gas Abatement Systems Revenue by Company (2020-2025)
2.3 Global Semiconductor Waste Gas Abatement Systems Players Sales Volume Ranking (2024)
2.4 Global Semiconductor Waste Gas Abatement Systems Sales Volume by Company Players (2020-2025)
2.5 Global Semiconductor Waste Gas Abatement Systems Average Price by Company (2020-2025)
2.6 Key Manufacturers Semiconductor Waste Gas Abatement Systems Manufacturing Base and Headquarters
2.7 Key Manufacturers Semiconductor Waste Gas Abatement Systems Product Offered
2.8 Key Manufacturers Time to Begin Mass Production of Semiconductor Waste Gas Abatement Systems
2.9 Semiconductor Waste Gas Abatement Systems Market Competitive Analysis
2.9.1 Semiconductor Waste Gas Abatement Systems Market Concentration Rate (2020-2025)
2.9.2 Global 5 and 10 Largest Manufacturers by Semiconductor Waste Gas Abatement Systems Revenue in 2024
2.9.3 Global Top Manufacturers by Company Type (Tier 1, Tier 2, and Tier 3) & (based on the Revenue in Semiconductor Waste Gas Abatement Systems as of 2024)
2.10 Mergers & Acquisitions, Expansion
3 Segmentation by Type
3.1 Introduction by Type
3.1.1 Combustion-wash Type
3.1.2 Dry Type
3.1.3 Catalytic Type
3.1.4 Wet Type
3.1.5 Plasma-wet Type
3.1.6 Others
3.2 Global Semiconductor Waste Gas Abatement Systems Sales Value by Type
3.2.1 Global Semiconductor Waste Gas Abatement Systems Sales Value by Type (2020 VS 2024 VS 2031)
3.2.2 Global Semiconductor Waste Gas Abatement Systems Sales Value, by Type (2020-2031)
3.2.3 Global Semiconductor Waste Gas Abatement Systems Sales Value, by Type (%) (2020-2031)
3.3 Global Semiconductor Waste Gas Abatement Systems Sales Volume by Type
3.3.1 Global Semiconductor Waste Gas Abatement Systems Sales Volume by Type (2020 VS 2024 VS 2031)
3.3.2 Global Semiconductor Waste Gas Abatement Systems Sales Volume, by Type (2020-2031)
3.3.3 Global Semiconductor Waste Gas Abatement Systems Sales Volume, by Type (%) (2020-2031)
3.4 Global Semiconductor Waste Gas Abatement Systems Average Price by Type (2020-2031)
4 Segmentation by Application
4.1 Introduction by Application
4.1.1 Plasma Etching
4.1.2 CVD and ALD
4.1.3 EPI
4.1.4 Ion Implantation
4.1.5 Others
4.2 Global Semiconductor Waste Gas Abatement Systems Sales Value by Application
4.2.1 Global Semiconductor Waste Gas Abatement Systems Sales Value by Application (2020 VS 2024 VS 2031)
4.2.2 Global Semiconductor Waste Gas Abatement Systems Sales Value, by Application (2020-2031)
4.2.3 Global Semiconductor Waste Gas Abatement Systems Sales Value, by Application (%) (2020-2031)
4.3 Global Semiconductor Waste Gas Abatement Systems Sales Volume by Application
4.3.1 Global Semiconductor Waste Gas Abatement Systems Sales Volume by Application (2020 VS 2024 VS 2031)
4.3.2 Global Semiconductor Waste Gas Abatement Systems Sales Volume, by Application (2020-2031)
4.3.3 Global Semiconductor Waste Gas Abatement Systems Sales Volume, by Application (%) (2020-2031)
4.4 Global Semiconductor Waste Gas Abatement Systems Average Price by Application (2020-2031)
5 Segmentation by Region
5.1 Global Semiconductor Waste Gas Abatement Systems Sales Value by Region
5.1.1 Global Semiconductor Waste Gas Abatement Systems Sales Value by Region: 2020 VS 2024 VS 2031
5.1.2 Global Semiconductor Waste Gas Abatement Systems Sales Value by Region (2020-2025)
5.1.3 Global Semiconductor Waste Gas Abatement Systems Sales Value by Region (2026-2031)
5.1.4 Global Semiconductor Waste Gas Abatement Systems Sales Value by Region (%), (2020-2031)
5.2 Global Semiconductor Waste Gas Abatement Systems Sales Volume by Region
5.2.1 Global Semiconductor Waste Gas Abatement Systems Sales Volume by Region: 2020 VS 2024 VS 2031
5.2.2 Global Semiconductor Waste Gas Abatement Systems Sales Volume by Region (2020-2025)
5.2.3 Global Semiconductor Waste Gas Abatement Systems Sales Volume by Region (2026-2031)
5.2.4 Global Semiconductor Waste Gas Abatement Systems Sales Volume by Region (%), (2020-2031)
5.3 Global Semiconductor Waste Gas Abatement Systems Average Price by Region (2020-2031)
5.4 North America
5.4.1 North America Semiconductor Waste Gas Abatement Systems Sales Value, 2020-2031
5.4.2 North America Semiconductor Waste Gas Abatement Systems Sales Value by Country (%), 2024 VS 2031
5.5 Europe
5.5.1 Europe Semiconductor Waste Gas Abatement Systems Sales Value, 2020-2031
5.5.2 Europe Semiconductor Waste Gas Abatement Systems Sales Value by Country (%), 2024 VS 2031
5.6 Asia Pacific
5.6.1 Asia Pacific Semiconductor Waste Gas Abatement Systems Sales Value, 2020-2031
5.6.2 Asia Pacific Semiconductor Waste Gas Abatement Systems Sales Value by Region (%), 2024 VS 2031
5.7 South America
5.7.1 South America Semiconductor Waste Gas Abatement Systems Sales Value, 2020-2031
5.7.2 South America Semiconductor Waste Gas Abatement Systems Sales Value by Country (%), 2024 VS 2031
5.8 Middle East & Africa
5.8.1 Middle East & Africa Semiconductor Waste Gas Abatement Systems Sales Value, 2020-2031
5.8.2 Middle East & Africa Semiconductor Waste Gas Abatement Systems Sales Value by Country (%), 2024 VS 2031
6 Segmentation by Key Countries/Regions
6.1 Key Countries/Regions Semiconductor Waste Gas Abatement Systems Sales Value Growth Trends, 2020 VS 2024 VS 2031
6.2 Key Countries/Regions Semiconductor Waste Gas Abatement Systems Sales Value and Sales Volume
6.2.1 Key Countries/Regions Semiconductor Waste Gas Abatement Systems Sales Value, 2020-2031
6.2.2 Key Countries/Regions Semiconductor Waste Gas Abatement Systems Sales Volume, 2020-2031
6.3 United States
6.3.1 United States Semiconductor Waste Gas Abatement Systems Sales Value, 2020-2031
6.3.2 United States Semiconductor Waste Gas Abatement Systems Sales Value by Type (%), 2024 VS 2031
6.3.3 United States Semiconductor Waste Gas Abatement Systems Sales Value by Application, 2024 VS 2031
6.4 Europe
6.4.1 Europe Semiconductor Waste Gas Abatement Systems Sales Value, 2020-2031
6.4.2 Europe Semiconductor Waste Gas Abatement Systems Sales Value by Type (%), 2024 VS 2031
6.4.3 Europe Semiconductor Waste Gas Abatement Systems Sales Value by Application, 2024 VS 2031
6.5 China
6.5.1 China Semiconductor Waste Gas Abatement Systems Sales Value, 2020-2031
6.5.2 China Semiconductor Waste Gas Abatement Systems Sales Value by Type (%), 2024 VS 2031
6.5.3 China Semiconductor Waste Gas Abatement Systems Sales Value by Application, 2024 VS 2031
6.6 Japan
6.6.1 Japan Semiconductor Waste Gas Abatement Systems Sales Value, 2020-2031
6.6.2 Japan Semiconductor Waste Gas Abatement Systems Sales Value by Type (%), 2024 VS 2031
6.6.3 Japan Semiconductor Waste Gas Abatement Systems Sales Value by Application, 2024 VS 2031
6.7 South Korea
6.7.1 South Korea Semiconductor Waste Gas Abatement Systems Sales Value, 2020-2031
6.7.2 South Korea Semiconductor Waste Gas Abatement Systems Sales Value by Type (%), 2024 VS 2031
6.7.3 South Korea Semiconductor Waste Gas Abatement Systems Sales Value by Application, 2024 VS 2031
6.8 Southeast Asia
6.8.1 Southeast Asia Semiconductor Waste Gas Abatement Systems Sales Value, 2020-2031
6.8.2 Southeast Asia Semiconductor Waste Gas Abatement Systems Sales Value by Type (%), 2024 VS 2031
6.8.3 Southeast Asia Semiconductor Waste Gas Abatement Systems Sales Value by Application, 2024 VS 2031
6.9 India
6.9.1 India Semiconductor Waste Gas Abatement Systems Sales Value, 2020-2031
6.9.2 India Semiconductor Waste Gas Abatement Systems Sales Value by Type (%), 2024 VS 2031
6.9.3 India Semiconductor Waste Gas Abatement Systems Sales Value by Application, 2024 VS 2031
7 Company Profiles
7.1 Ebara
7.1.1 Ebara Company Information
7.1.2 Ebara Introduction and Business Overview
7.1.3 Ebara Semiconductor Waste Gas Abatement Systems Sales, Revenue, Price and Gross Margin (2020-2025)
7.1.4 Ebara Semiconductor Waste Gas Abatement Systems Product Offerings
7.1.5 Ebara Recent Development
7.2 Atlas Copco (Edwards and CSK brands)
7.2.1 Atlas Copco (Edwards and CSK brands) Company Information
7.2.2 Atlas Copco (Edwards and CSK brands) Introduction and Business Overview
7.2.3 Atlas Copco (Edwards and CSK brands) Semiconductor Waste Gas Abatement Systems Sales, Revenue, Price and Gross Margin (2020-2025)
7.2.4 Atlas Copco (Edwards and CSK brands) Semiconductor Waste Gas Abatement Systems Product Offerings
7.2.5 Atlas Copco (Edwards and CSK brands) Recent Development
7.3 GST (Global Standard Technology)
7.3.1 GST (Global Standard Technology) Company Information
7.3.2 GST (Global Standard Technology) Introduction and Business Overview
7.3.3 GST (Global Standard Technology) Semiconductor Waste Gas Abatement Systems Sales, Revenue, Price and Gross Margin (2020-2025)
7.3.4 GST (Global Standard Technology) Semiconductor Waste Gas Abatement Systems Product Offerings
7.3.5 GST (Global Standard Technology) Recent Development
7.4 Shanghai Shengjian Technology
7.4.1 Shanghai Shengjian Technology Company Information
7.4.2 Shanghai Shengjian Technology Introduction and Business Overview
7.4.3 Shanghai Shengjian Technology Semiconductor Waste Gas Abatement Systems Sales, Revenue, Price and Gross Margin (2020-2025)
7.4.4 Shanghai Shengjian Technology Semiconductor Waste Gas Abatement Systems Product Offerings
7.4.5 Shanghai Shengjian Technology Recent Development
7.5 Busch Group
7.5.1 Busch Group Company Information
7.5.2 Busch Group Introduction and Business Overview
7.5.3 Busch Group Semiconductor Waste Gas Abatement Systems Sales, Revenue, Price and Gross Margin (2020-2025)
7.5.4 Busch Group Semiconductor Waste Gas Abatement Systems Product Offerings
7.5.5 Busch Group Recent Development
7.6 DAS Environmental Expert
7.6.1 DAS Environmental Expert Company Information
7.6.2 DAS Environmental Expert Introduction and Business Overview
7.6.3 DAS Environmental Expert Semiconductor Waste Gas Abatement Systems Sales, Revenue, Price and Gross Margin (2020-2025)
7.6.4 DAS Environmental Expert Semiconductor Waste Gas Abatement Systems Product Offerings
7.6.5 DAS Environmental Expert Recent Development
7.7 CS Clean Solutions
7.7.1 CS Clean Solutions Company Information
7.7.2 CS Clean Solutions Introduction and Business Overview
7.7.3 CS Clean Solutions Semiconductor Waste Gas Abatement Systems Sales, Revenue, Price and Gross Margin (2020-2025)
7.7.4 CS Clean Solutions Semiconductor Waste Gas Abatement Systems Product Offerings
7.7.5 CS Clean Solutions Recent Development
7.8 Kanken Techno
7.8.1 Kanken Techno Company Information
7.8.2 Kanken Techno Introduction and Business Overview
7.8.3 Kanken Techno Semiconductor Waste Gas Abatement Systems Sales, Revenue, Price and Gross Margin (2020-2025)
7.8.4 Kanken Techno Semiconductor Waste Gas Abatement Systems Product Offerings
7.8.5 Kanken Techno Recent Development
7.9 Beijing Jingyi Automation Equipment
7.9.1 Beijing Jingyi Automation Equipment Company Information
7.9.2 Beijing Jingyi Automation Equipment Introduction and Business Overview
7.9.3 Beijing Jingyi Automation Equipment Semiconductor Waste Gas Abatement Systems Sales, Revenue, Price and Gross Margin (2020-2025)
7.9.4 Beijing Jingyi Automation Equipment Semiconductor Waste Gas Abatement Systems Product Offerings
7.9.5 Beijing Jingyi Automation Equipment Recent Development
7.10 Unisem
7.10.1 Unisem Company Information
7.10.2 Unisem Introduction and Business Overview
7.10.3 Unisem Semiconductor Waste Gas Abatement Systems Sales, Revenue, Price and Gross Margin (2020-2025)
7.10.4 Unisem Semiconductor Waste Gas Abatement Systems Product Offerings
7.10.5 Unisem Recent Development
7.11 Ecosys Abatement
7.11.1 Ecosys Abatement Company Information
7.11.2 Ecosys Abatement Introduction and Business Overview
7.11.3 Ecosys Abatement Semiconductor Waste Gas Abatement Systems Sales, Revenue, Price and Gross Margin (2020-2025)
7.11.4 Ecosys Abatement Semiconductor Waste Gas Abatement Systems Product Offerings
7.11.5 Ecosys Abatement Recent Development
7.12 CECO Environmental
7.12.1 CECO Environmental Company Information
7.12.2 CECO Environmental Introduction and Business Overview
7.12.3 CECO Environmental Semiconductor Waste Gas Abatement Systems Sales, Revenue, Price and Gross Margin (2020-2025)
7.12.4 CECO Environmental Semiconductor Waste Gas Abatement Systems Product Offerings
7.12.5 CECO Environmental Recent Development
7.13 Highvac
7.13.1 Highvac Company Information
7.13.2 Highvac Introduction and Business Overview
7.13.3 Highvac Semiconductor Waste Gas Abatement Systems Sales, Revenue, Price and Gross Margin (2020-2025)
7.13.4 Highvac Semiconductor Waste Gas Abatement Systems Product Offerings
7.13.5 Highvac Recent Development
7.14 Nippon Sanso (Mitsubishi Chemical)
7.14.1 Nippon Sanso (Mitsubishi Chemical) Company Information
7.14.2 Nippon Sanso (Mitsubishi Chemical) Introduction and Business Overview
7.14.3 Nippon Sanso (Mitsubishi Chemical) Semiconductor Waste Gas Abatement Systems Sales, Revenue, Price and Gross Margin (2020-2025)
7.14.4 Nippon Sanso (Mitsubishi Chemical) Semiconductor Waste Gas Abatement Systems Product Offerings
7.14.5 Nippon Sanso (Mitsubishi Chemical) Recent Development
7.15 Anguil Environmental Systems
7.15.1 Anguil Environmental Systems Company Information
7.15.2 Anguil Environmental Systems Introduction and Business Overview
7.15.3 Anguil Environmental Systems Semiconductor Waste Gas Abatement Systems Sales, Revenue, Price and Gross Margin (2020-2025)
7.15.4 Anguil Environmental Systems Semiconductor Waste Gas Abatement Systems Product Offerings
7.15.5 Anguil Environmental Systems Recent Development
7.16 Resonac (formerly Showa Denko)
7.16.1 Resonac (formerly Showa Denko) Company Information
7.16.2 Resonac (formerly Showa Denko) Introduction and Business Overview
7.16.3 Resonac (formerly Showa Denko) Semiconductor Waste Gas Abatement Systems Sales, Revenue, Price and Gross Margin (2020-2025)
7.16.4 Resonac (formerly Showa Denko) Semiconductor Waste Gas Abatement Systems Product Offerings
7.16.5 Resonac (formerly Showa Denko) Recent Development
8 Industry Chain Analysis
8.1 Semiconductor Waste Gas Abatement Systems Industrial Chain
8.2 Semiconductor Waste Gas Abatement Systems Upstream Analysis
8.2.1 Key Raw Materials
8.2.2 Raw Materials Key Suppliers
8.2.3 Manufacturing Cost Structure
8.3 Midstream Analysis
8.4 Downstream Analysis (Customers Analysis)
8.5 Sales Model and Sales Channels
8.5.1 Semiconductor Waste Gas Abatement Systems Sales Model
8.5.2 Sales Channel
8.5.3 Semiconductor Waste Gas Abatement Systems Distributors
9 Research Findings and Conclusion
10 Appendix
10.1 Research Methodology
10.1.1 Methodology/Research Approach
10.1.1.1 Research Programs/Design
10.1.1.2 Market Size Estimation
10.1.1.3 Market Breakdown and Data Triangulation
10.1.2 Data Source
10.1.2.1 Secondary Sources
10.1.2.2 Primary Sources
10.2 Author Details
10.3 Disclaimer

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