Semiconductor Waste Gas Abatement Systems Market to Reach US$ 2.72 Billion by 2031, Driven by Environmental Regulations and Advanced Semiconductor Manufacturing | QY Research

Market Summary -

The global market for Semiconductor Waste Gas Abatement Systems was estimated to be worth US$ 1,433 million in 2024 and is forecast to reach a readjusted size of US$ 2,717 million by 2031, expanding at a CAGR of 9.1% during the forecast period 2025-2031.

According to QY Research, a newly released study titled "Semiconductor Waste Gas Abatement Systems Market Share and Ranking, Overall Sales and Demand Forecast 2025-2031" delivers a comprehensive, data-driven assessment of the global market. The report is designed to support semiconductor equipment manufacturers, fabs, environmental solution providers, and investors with validated market intelligence, competitive benchmarking, and forward-looking insights across regions, technologies, and applications.

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Trade Policy Impact and Supply Chain Reconfiguration -

This report provides a detailed assessment of recent tariff adjustments and international strategic countermeasures affecting the semiconductor waste gas abatement systems market. With semiconductor manufacturing increasingly globalized, shifts in trade policy are influencing cross-border industrial footprints, capital allocation decisions, regional supply chain dependencies, and localization strategies for abatement equipment. These factors are becoming increasingly important as fabs expand capacity in Asia-Pacific, North America, and Europe while navigating regulatory and geopolitical uncertainty.

Industry Overview and Technology Landscape -

Semiconductor manufacturing relies heavily on specialty process gases that are toxic, flammable, corrosive, and environmentally harmful. During critical processes such as plasma etching, CVD, ALD, epitaxy, and ion implantation, exhaust gases must be treated and reduced below regulatory threshold limit values (TLVs) before release into the atmosphere.

Semiconductor waste gas abatement systems are engineered to neutralize or decompose these gases using thermal, wet, dry, catalytic, plasma-based, or hybrid treatment technologies. By converting hazardous exhaust into environmentally safe byproducts, these systems enable fabs to meet stringent environmental and occupational safety regulations while supporting sustainable semiconductor manufacturing.

As chip geometries shrink and process complexity increases, waste gas composition becomes more challenging, driving demand for high-efficiency, application-specific abatement solutions.

Market Drivers and Development Trends -
► The semiconductor waste gas abatement systems market is experiencing robust growth due to several structural drivers:
► Rapid expansion of global semiconductor fabrication capacity, including logic, memory, and advanced packaging
► Tightening environmental regulations governing toxic and greenhouse gas emissions
► Growing focus on sustainable and green manufacturing practices
► Increased complexity of semiconductor process gases in advanced nodes

Governments worldwide are enforcing stricter emissions standards, making abatement equipment a mandatory infrastructure investment rather than an optional add-on. At the same time, technology advancements are improving abatement efficiency, uptime, and compatibility with next-generation semiconductor processes.

The future outlook for the market remains highly positive, with strong opportunities for technological innovation, system integration, and expansion into emerging semiconductor hubs.

Market Segmentation and Regional Analysis -

By Type -
► Combustion-wash Type
► Dry Type
► Catalytic Type
► Wet Type
► Plasma-wet Type
► Others

By Application -
► Plasma Etching
► CVD and ALD
► EPI
► Ion Implantation
► Others

By Region -
✔ Asia Pacific (China, Japan, South Korea, Southeast Asia, India, etc.)
✔ North America (U.S., Canada, Mexico)
✔ Europe (Germany, France, UK, Italy, etc.)
✔ South America (Brazil, etc.)
✔ Middle East and Africa (Turkey, GCC Countries, Africa, etc.)

Asia Pacific dominates the market due to its concentration of semiconductor fabs and ongoing capacity expansion. North America and Europe continue to invest in advanced manufacturing and localized semiconductor supply chains, further supporting demand for waste gas abatement systems.

Key Companies Profiled -
► Ebara
► Atlas Copco (Edwards and CSK brands)
► GST (Global Standard Technology)
► Shanghai Shengjian Technology
► Busch Group
► DAS Environmental Expert
► CS Clean Solutions
► Kanken Techno
► Beijing Jingyi Automation Equipment
► Unisem
► Ecosys Abatement
► CECO Environmental
► Highvac
► Nippon Sanso (Mitsubishi Chemical)
► Anguil Environmental Systems
► Resonac (formerly Showa Denko)

These companies compete on technology performance, system reliability, regulatory compliance, and global service capabilities.

Reasons to Procure This Report -
► Access global and regional market revenue and volume forecasts through 2031
► Understand competitive positioning and market share rankings
► Identify high-growth abatement technologies and semiconductor process applications
► Analyze regulatory impacts, sustainability trends, and supply chain risks
► Support strategic planning for capacity expansion, partnerships, and technology investment

Key Questions Answered in the Report -
► What is the current size and future growth outlook of the semiconductor waste gas abatement systems market?
► Which abatement technologies and applications will drive demand growth?
► How is the competitive landscape evolving across regions?
► What role do environmental regulations play in shaping market expansion?
► What opportunities and risks exist for established players and new entrants?

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Table of Content:
1 Market Overview
1.1 Semiconductor Waste Gas Abatement Systems Product Introduction
1.2 Global Semiconductor Waste Gas Abatement Systems Market Size Forecast
1.2.1 Global Semiconductor Waste Gas Abatement Systems Sales Value (2020-2031)
1.2.2 Global Semiconductor Waste Gas Abatement Systems Sales Volume (2020-2031)
1.2.3 Global Semiconductor Waste Gas Abatement Systems Sales Price (2020-2031)
1.3 Semiconductor Waste Gas Abatement Systems Market Trends & Drivers
1.3.1 Semiconductor Waste Gas Abatement Systems Industry Trends
1.3.2 Semiconductor Waste Gas Abatement Systems Market Drivers & Opportunity
1.3.3 Semiconductor Waste Gas Abatement Systems Market Challenges
1.3.4 Semiconductor Waste Gas Abatement Systems Market Restraints
1.4 Assumptions and Limitations
1.5 Study Objectives
1.6 Years Considered
2 Competitive Analysis by Company
2.1 Global Semiconductor Waste Gas Abatement Systems Players Revenue Ranking (2024)
2.2 Global Semiconductor Waste Gas Abatement Systems Revenue by Company (2020-2025)
2.3 Global Semiconductor Waste Gas Abatement Systems Players Sales Volume Ranking (2024)
2.4 Global Semiconductor Waste Gas Abatement Systems Sales Volume by Company Players (2020-2025)
2.5 Global Semiconductor Waste Gas Abatement Systems Average Price by Company (2020-2025)
2.6 Key Manufacturers Semiconductor Waste Gas Abatement Systems Manufacturing Base and Headquarters
2.7 Key Manufacturers Semiconductor Waste Gas Abatement Systems Product Offered
2.8 Key Manufacturers Time to Begin Mass Production of Semiconductor Waste Gas Abatement Systems
2.9 Semiconductor Waste Gas Abatement Systems Market Competitive Analysis
2.9.1 Semiconductor Waste Gas Abatement Systems Market Concentration Rate (2020-2025)
2.9.2 Global 5 and 10 Largest Manufacturers by Semiconductor Waste Gas Abatement Systems Revenue in 2024
2.9.3 Global Top Manufacturers by Company Type (Tier 1, Tier 2, and Tier 3) & (based on the Revenue in Semiconductor Waste Gas Abatement Systems as of 2024)
2.10 Mergers & Acquisitions, Expansion
3 Segmentation by Type
3.1 Introduction by Type
3.1.1 Combustion-wash Type
3.1.2 Dry Type
3.1.3 Catalytic Type
3.1.4 Wet Type
3.1.5 Plasma-wet Type
3.1.6 Others
3.2 Global Semiconductor Waste Gas Abatement Systems Sales Value by Type
3.2.1 Global Semiconductor Waste Gas Abatement Systems Sales Value by Type (2020 VS 2024 VS 2031)
3.2.2 Global Semiconductor Waste Gas Abatement Systems Sales Value, by Type (2020-2031)
3.2.3 Global Semiconductor Waste Gas Abatement Systems Sales Value, by Type (%) (2020-2031)
3.3 Global Semiconductor Waste Gas Abatement Systems Sales Volume by Type
3.3.1 Global Semiconductor Waste Gas Abatement Systems Sales Volume by Type (2020 VS 2024 VS 2031)
3.3.2 Global Semiconductor Waste Gas Abatement Systems Sales Volume, by Type (2020-2031)
3.3.3 Global Semiconductor Waste Gas Abatement Systems Sales Volume, by Type (%) (2020-2031)
3.4 Global Semiconductor Waste Gas Abatement Systems Average Price by Type (2020-2031)
4 Segmentation by Application
4.1 Introduction by Application
4.1.1 Plasma Etching
4.1.2 CVD and ALD
4.1.3 EPI
4.1.4 Ion Implantation
4.1.5 Others
4.2 Global Semiconductor Waste Gas Abatement Systems Sales Value by Application
4.2.1 Global Semiconductor Waste Gas Abatement Systems Sales Value by Application (2020 VS 2024 VS 2031)
4.2.2 Global Semiconductor Waste Gas Abatement Systems Sales Value, by Application (2020-2031)
4.2.3 Global Semiconductor Waste Gas Abatement Systems Sales Value, by Application (%) (2020-2031)
4.3 Global Semiconductor Waste Gas Abatement Systems Sales Volume by Application
4.3.1 Global Semiconductor Waste Gas Abatement Systems Sales Volume by Application (2020 VS 2024 VS 2031)
4.3.2 Global Semiconductor Waste Gas Abatement Systems Sales Volume, by Application (2020-2031)
4.3.3 Global Semiconductor Waste Gas Abatement Systems Sales Volume, by Application (%) (2020-2031)
4.4 Global Semiconductor Waste Gas Abatement Systems Average Price by Application (2020-2031)
5 Segmentation by Region
5.1 Global Semiconductor Waste Gas Abatement Systems Sales Value by Region
5.1.1 Global Semiconductor Waste Gas Abatement Systems Sales Value by Region: 2020 VS 2024 VS 2031
5.1.2 Global Semiconductor Waste Gas Abatement Systems Sales Value by Region (2020-2025)
5.1.3 Global Semiconductor Waste Gas Abatement Systems Sales Value by Region (2026-2031)
5.1.4 Global Semiconductor Waste Gas Abatement Systems Sales Value by Region (%), (2020-2031)
5.2 Global Semiconductor Waste Gas Abatement Systems Sales Volume by Region
5.2.1 Global Semiconductor Waste Gas Abatement Systems Sales Volume by Region: 2020 VS 2024 VS 2031
5.2.2 Global Semiconductor Waste Gas Abatement Systems Sales Volume by Region (2020-2025)
5.2.3 Global Semiconductor Waste Gas Abatement Systems Sales Volume by Region (2026-2031)
5.2.4 Global Semiconductor Waste Gas Abatement Systems Sales Volume by Region (%), (2020-2031)
5.3 Global Semiconductor Waste Gas Abatement Systems Average Price by Region (2020-2031)
5.4 North America
5.4.1 North America Semiconductor Waste Gas Abatement Systems Sales Value, 2020-2031
5.4.2 North America Semiconductor Waste Gas Abatement Systems Sales Value by Country (%), 2024 VS 2031
5.5 Europe
5.5.1 Europe Semiconductor Waste Gas Abatement Systems Sales Value, 2020-2031
5.5.2 Europe Semiconductor Waste Gas Abatement Systems Sales Value by Country (%), 2024 VS 2031
5.6 Asia Pacific
5.6.1 Asia Pacific Semiconductor Waste Gas Abatement Systems Sales Value, 2020-2031
5.6.2 Asia Pacific Semiconductor Waste Gas Abatement Systems Sales Value by Region (%), 2024 VS 2031
5.7 South America
5.7.1 South America Semiconductor Waste Gas Abatement Systems Sales Value, 2020-2031
5.7.2 South America Semiconductor Waste Gas Abatement Systems Sales Value by Country (%), 2024 VS 2031
5.8 Middle East & Africa
5.8.1 Middle East & Africa Semiconductor Waste Gas Abatement Systems Sales Value, 2020-2031
5.8.2 Middle East & Africa Semiconductor Waste Gas Abatement Systems Sales Value by Country (%), 2024 VS 2031
6 Segmentation by Key Countries/Regions
6.1 Key Countries/Regions Semiconductor Waste Gas Abatement Systems Sales Value Growth Trends, 2020 VS 2024 VS 2031
6.2 Key Countries/Regions Semiconductor Waste Gas Abatement Systems Sales Value and Sales Volume
6.2.1 Key Countries/Regions Semiconductor Waste Gas Abatement Systems Sales Value, 2020-2031
6.2.2 Key Countries/Regions Semiconductor Waste Gas Abatement Systems Sales Volume, 2020-2031
6.3 United States
6.3.1 United States Semiconductor Waste Gas Abatement Systems Sales Value, 2020-2031
6.3.2 United States Semiconductor Waste Gas Abatement Systems Sales Value by Type (%), 2024 VS 2031
6.3.3 United States Semiconductor Waste Gas Abatement Systems Sales Value by Application, 2024 VS 2031
6.4 Europe
6.4.1 Europe Semiconductor Waste Gas Abatement Systems Sales Value, 2020-2031
6.4.2 Europe Semiconductor Waste Gas Abatement Systems Sales Value by Type (%), 2024 VS 2031
6.4.3 Europe Semiconductor Waste Gas Abatement Systems Sales Value by Application, 2024 VS 2031
6.5 China
6.5.1 China Semiconductor Waste Gas Abatement Systems Sales Value, 2020-2031
6.5.2 China Semiconductor Waste Gas Abatement Systems Sales Value by Type (%), 2024 VS 2031
6.5.3 China Semiconductor Waste Gas Abatement Systems Sales Value by Application, 2024 VS 2031
6.6 Japan
6.6.1 Japan Semiconductor Waste Gas Abatement Systems Sales Value, 2020-2031
6.6.2 Japan Semiconductor Waste Gas Abatement Systems Sales Value by Type (%), 2024 VS 2031
6.6.3 Japan Semiconductor Waste Gas Abatement Systems Sales Value by Application, 2024 VS 2031
6.7 South Korea
6.7.1 South Korea Semiconductor Waste Gas Abatement Systems Sales Value, 2020-2031
6.7.2 South Korea Semiconductor Waste Gas Abatement Systems Sales Value by Type (%), 2024 VS 2031
6.7.3 South Korea Semiconductor Waste Gas Abatement Systems Sales Value by Application, 2024 VS 2031
6.8 Southeast Asia
6.8.1 Southeast Asia Semiconductor Waste Gas Abatement Systems Sales Value, 2020-2031
6.8.2 Southeast Asia Semiconductor Waste Gas Abatement Systems Sales Value by Type (%), 2024 VS 2031
6.8.3 Southeast Asia Semiconductor Waste Gas Abatement Systems Sales Value by Application, 2024 VS 2031
6.9 India
6.9.1 India Semiconductor Waste Gas Abatement Systems Sales Value, 2020-2031
6.9.2 India Semiconductor Waste Gas Abatement Systems Sales Value by Type (%), 2024 VS 2031
6.9.3 India Semiconductor Waste Gas Abatement Systems Sales Value by Application, 2024 VS 2031
7 Company Profiles
7.1 Ebara
7.1.1 Ebara Company Information
7.1.2 Ebara Introduction and Business Overview
7.1.3 Ebara Semiconductor Waste Gas Abatement Systems Sales, Revenue, Price and Gross Margin (2020-2025)
7.1.4 Ebara Semiconductor Waste Gas Abatement Systems Product Offerings
7.1.5 Ebara Recent Development
7.2 Atlas Copco (Edwards and CSK brands)
7.2.1 Atlas Copco (Edwards and CSK brands) Company Information
7.2.2 Atlas Copco (Edwards and CSK brands) Introduction and Business Overview
7.2.3 Atlas Copco (Edwards and CSK brands) Semiconductor Waste Gas Abatement Systems Sales, Revenue, Price and Gross Margin (2020-2025)
7.2.4 Atlas Copco (Edwards and CSK brands) Semiconductor Waste Gas Abatement Systems Product Offerings
7.2.5 Atlas Copco (Edwards and CSK brands) Recent Development
7.3 GST (Global Standard Technology)
7.3.1 GST (Global Standard Technology) Company Information
7.3.2 GST (Global Standard Technology) Introduction and Business Overview
7.3.3 GST (Global Standard Technology) Semiconductor Waste Gas Abatement Systems Sales, Revenue, Price and Gross Margin (2020-2025)
7.3.4 GST (Global Standard Technology) Semiconductor Waste Gas Abatement Systems Product Offerings
7.3.5 GST (Global Standard Technology) Recent Development
7.4 Shanghai Shengjian Technology
7.4.1 Shanghai Shengjian Technology Company Information
7.4.2 Shanghai Shengjian Technology Introduction and Business Overview
7.4.3 Shanghai Shengjian Technology Semiconductor Waste Gas Abatement Systems Sales, Revenue, Price and Gross Margin (2020-2025)
7.4.4 Shanghai Shengjian Technology Semiconductor Waste Gas Abatement Systems Product Offerings
7.4.5 Shanghai Shengjian Technology Recent Development
7.5 Busch Group
7.5.1 Busch Group Company Information
7.5.2 Busch Group Introduction and Business Overview
7.5.3 Busch Group Semiconductor Waste Gas Abatement Systems Sales, Revenue, Price and Gross Margin (2020-2025)
7.5.4 Busch Group Semiconductor Waste Gas Abatement Systems Product Offerings
7.5.5 Busch Group Recent Development
7.6 DAS Environmental Expert
7.6.1 DAS Environmental Expert Company Information
7.6.2 DAS Environmental Expert Introduction and Business Overview
7.6.3 DAS Environmental Expert Semiconductor Waste Gas Abatement Systems Sales, Revenue, Price and Gross Margin (2020-2025)
7.6.4 DAS Environmental Expert Semiconductor Waste Gas Abatement Systems Product Offerings
7.6.5 DAS Environmental Expert Recent Development
7.7 CS Clean Solutions
7.7.1 CS Clean Solutions Company Information
7.7.2 CS Clean Solutions Introduction and Business Overview
7.7.3 CS Clean Solutions Semiconductor Waste Gas Abatement Systems Sales, Revenue, Price and Gross Margin (2020-2025)
7.7.4 CS Clean Solutions Semiconductor Waste Gas Abatement Systems Product Offerings
7.7.5 CS Clean Solutions Recent Development
7.8 Kanken Techno
7.8.1 Kanken Techno Company Information
7.8.2 Kanken Techno Introduction and Business Overview
7.8.3 Kanken Techno Semiconductor Waste Gas Abatement Systems Sales, Revenue, Price and Gross Margin (2020-2025)
7.8.4 Kanken Techno Semiconductor Waste Gas Abatement Systems Product Offerings
7.8.5 Kanken Techno Recent Development
7.9 Beijing Jingyi Automation Equipment
7.9.1 Beijing Jingyi Automation Equipment Company Information
7.9.2 Beijing Jingyi Automation Equipment Introduction and Business Overview
7.9.3 Beijing Jingyi Automation Equipment Semiconductor Waste Gas Abatement Systems Sales, Revenue, Price and Gross Margin (2020-2025)
7.9.4 Beijing Jingyi Automation Equipment Semiconductor Waste Gas Abatement Systems Product Offerings
7.9.5 Beijing Jingyi Automation Equipment Recent Development
7.10 Unisem
7.10.1 Unisem Company Information
7.10.2 Unisem Introduction and Business Overview
7.10.3 Unisem Semiconductor Waste Gas Abatement Systems Sales, Revenue, Price and Gross Margin (2020-2025)
7.10.4 Unisem Semiconductor Waste Gas Abatement Systems Product Offerings
7.10.5 Unisem Recent Development
7.11 Ecosys Abatement
7.11.1 Ecosys Abatement Company Information
7.11.2 Ecosys Abatement Introduction and Business Overview
7.11.3 Ecosys Abatement Semiconductor Waste Gas Abatement Systems Sales, Revenue, Price and Gross Margin (2020-2025)
7.11.4 Ecosys Abatement Semiconductor Waste Gas Abatement Systems Product Offerings
7.11.5 Ecosys Abatement Recent Development
7.12 CECO Environmental
7.12.1 CECO Environmental Company Information
7.12.2 CECO Environmental Introduction and Business Overview
7.12.3 CECO Environmental Semiconductor Waste Gas Abatement Systems Sales, Revenue, Price and Gross Margin (2020-2025)
7.12.4 CECO Environmental Semiconductor Waste Gas Abatement Systems Product Offerings
7.12.5 CECO Environmental Recent Development
7.13 Highvac
7.13.1 Highvac Company Information
7.13.2 Highvac Introduction and Business Overview
7.13.3 Highvac Semiconductor Waste Gas Abatement Systems Sales, Revenue, Price and Gross Margin (2020-2025)
7.13.4 Highvac Semiconductor Waste Gas Abatement Systems Product Offerings
7.13.5 Highvac Recent Development
7.14 Nippon Sanso (Mitsubishi Chemical)
7.14.1 Nippon Sanso (Mitsubishi Chemical) Company Information
7.14.2 Nippon Sanso (Mitsubishi Chemical) Introduction and Business Overview
7.14.3 Nippon Sanso (Mitsubishi Chemical) Semiconductor Waste Gas Abatement Systems Sales, Revenue, Price and Gross Margin (2020-2025)
7.14.4 Nippon Sanso (Mitsubishi Chemical) Semiconductor Waste Gas Abatement Systems Product Offerings
7.14.5 Nippon Sanso (Mitsubishi Chemical) Recent Development
7.15 Anguil Environmental Systems
7.15.1 Anguil Environmental Systems Company Information
7.15.2 Anguil Environmental Systems Introduction and Business Overview
7.15.3 Anguil Environmental Systems Semiconductor Waste Gas Abatement Systems Sales, Revenue, Price and Gross Margin (2020-2025)
7.15.4 Anguil Environmental Systems Semiconductor Waste Gas Abatement Systems Product Offerings
7.15.5 Anguil Environmental Systems Recent Development
7.16 Resonac (formerly Showa Denko)
7.16.1 Resonac (formerly Showa Denko) Company Information
7.16.2 Resonac (formerly Showa Denko) Introduction and Business Overview
7.16.3 Resonac (formerly Showa Denko) Semiconductor Waste Gas Abatement Systems Sales, Revenue, Price and Gross Margin (2020-2025)
7.16.4 Resonac (formerly Showa Denko) Semiconductor Waste Gas Abatement Systems Product Offerings
7.16.5 Resonac (formerly Showa Denko) Recent Development
8 Industry Chain Analysis
8.1 Semiconductor Waste Gas Abatement Systems Industrial Chain
8.2 Semiconductor Waste Gas Abatement Systems Upstream Analysis
8.2.1 Key Raw Materials
8.2.2 Raw Materials Key Suppliers
8.2.3 Manufacturing Cost Structure
8.3 Midstream Analysis
8.4 Downstream Analysis (Customers Analysis)
8.5 Sales Model and Sales Channels
8.5.1 Semiconductor Waste Gas Abatement Systems Sales Model
8.5.2 Sales Channel
8.5.3 Semiconductor Waste Gas Abatement Systems Distributors
9 Research Findings and Conclusion
10 Appendix
10.1 Research Methodology
10.1.1 Methodology/Research Approach
10.1.1.1 Research Programs/Design
10.1.1.2 Market Size Estimation
10.1.1.3 Market Breakdown and Data Triangulation
10.1.2 Data Source
10.1.2.1 Secondary Sources
10.1.2.2 Primary Sources
10.2 Author Details
10.3 Disclaimer

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