Semiconductor Furnace Equipment Market Set to Surge - Key Insights You Must Know

Semiconductor Furnace Equipement Market Size

The global market for Semiconductor Furnace Equipement was valued at US$ 2609 million in the year 2024 and is projected to reach a revised size of US$ 3875 million by 2031, growing at a CAGR of 5.9% during the forecast period.

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Semiconductor furnace tubes are equipment used in oxidation, diffusion, and annealing processes.

Oxidation: In the process of manufacturing integrated circuits, semiconductor furnace tube equipment is used to form a silicon dioxide (SiO2) layer on a silicon substrate, which is a key step in manufacturing MOS (metal-oxide-semiconductor) structures. The oxide layer acts as an insulating layer.

Annealing: Furnace tube equipment is used to anneal semiconductor materials to activate injected dopants, eliminate lattice defects, and improve the electrical properties or microstructure of the semiconductor.

Diffusion: Furnace tube equipment is used to introduce dopant (such as boron, phosphorus, arsenic, etc.) into the silicon substrate to form PN junctions and other doped regions, such as N-type or P-type semiconductor regions.

The main types of semiconductor furnace tubes include vertical furnaces, horizontal furnaces, and RTP. Globally, the core companies of vertical oxidation furnaces are TEL, Kokusai Electric, JTEKT Thermo Systems, ASM International and Northern Huachuang, among which the top three companies account for more than 70%.

By Type
• Vertical Furnace
• Horizontal Furnace
• RTP

By Application
• Oxidation
• Annealing
• Diffusion

Key Companies
ASM International, Tokyo Electron Limited, JTEKT Corporation, Kokusai Electric Corporation, Centrotherm, CETC48, Thermco Systems, NAURA, ACM Research, SVCS, SPTS (KLA), Hunan Exwell Semiconductor, PNC Process Systems, Amber Intelligence Semiconductor Equipment (Shanghai) Co., LTD, Hefei Ture P Technology, Wuxi Songyu Technology, Amtech Systems, Inc, Ohkura, Tystar, Applied Materials, Mattson Technology, Ulvac, Ultratech (Veeco), LARCOMSE, AnnealSys, Sumitomo Heavy Industries, Ltd, Advanced Materials Technology & Engineering, ULTECH, LAPLACE Renewable Energy Technology, UniTemp GmbH

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