Semiconductor Dry Vacuum Pump Market Share Driven by Advanced Chip Manufacturing Demand | Valuates Reports

Semiconductor Dry Vacuum Pump Market Size
The global market for Semiconductor Dry Vacuum Pump was valued at US$ 1330 million in the year 2024 and is projected to reach a revised size of US$ 2384 million by 2031, growing at a CAGR of 8.8% during the forecast period.

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The Semiconductor Dry Vacuum Pump Market is witnessing strong momentum as advanced chip fabrication processes continue to evolve, pushing demand for contamination-free, energy-efficient vacuum systems. Major market trends such as the transition toward complex device architectures, growth in cleanroom production environments, and rising requirements in etching, lithography, deposition, and wafer processing are reshaping the overall market size and market growth. Increasing adoption of dry pump technologies in semiconductor fabs is supported by their reliability, reduced maintenance needs, and ability to handle harsh process gases, strengthening their position in global supply chains.

Within the type segment, screw vacuum pumps currently hold the largest market share due to their durability, low vibration performance, and suitability for heavy semiconductor workloads. Scroll vacuum pumps are emerging as the fastest-growing segment because of their oil-free operation and efficiency in clean processes. Claw vacuum pumps and other specialized dry pump variants continue to support niche process steps, reinforcing diversified market trends across fab environments. Together, these technologies provide a broad performance spectrum that aligns with evolving chip production needs.

In application analysis, CVD & PVD processes dominate the market share as semiconductor manufacturers increasingly depend on precision thin-film deposition for advanced node devices. The lithography and etching segment is growing rapidly as fabs expand patterning capabilities to support high-density chip designs. Other downstream semiconductor applications further reinforce demand for dry vacuum pumps as the industry prioritizes clean, stable, and energy-efficient vacuum environments essential for next-generation manufacturing.

Leading companies such as Atlas Copco (Edwards Vacuum), Ebara Corporation, Pfeiffer Vacuum GmbH, Kashiyama Industries, and ULVAC maintain strong market share through continuous innovation, expanded product portfolios, and deep integration with global semiconductor fabs. Publicly available sources highlight their focus on dry pump technologies engineered for extreme process conditions, enhanced gas handling, and improved service lifecycles. Emerging players including Beijing Grand Hitek, SKY Technology Development, Ningbo Baosi Energy Equipment, LOTVACUUM, and Highvac Corporation are gaining traction by offering cost-competitive solutions and expanding their regional footprints across key semiconductor clusters.

Regionally, Asia-Pacific leads the market share due to strong semiconductor manufacturing infrastructure, rapid foundry expansions, and high adoption of advanced vacuum technologies. Europe, Japan, South Korea, and China remain major production hubs, while North America continues to demonstrate robust market growth through technological upgrades and increased fab investments. As global semiconductor ecosystems expand, the market forecast for dry vacuum pumps indicates sustained growth driven by innovations in advanced manufacturing, environmental compliance, equipment modernization, and strong government support for semiconductor capability development worldwide.

by Type

• Screw Vacuum Pump
• Scroll Vacuum Pump
• Claw Vacuum Pump
• Others

by Application

• CVD&PVD
• Lithography&Etching
• Others

By Company

Atlas Copco (Edwards Vacuum), Ebara Corporation, Pfeiffer Vacuum GmbH, Kashiyama Industries, Beijing Grand Hitek, SKY Technology Development, Ningbo Baosi Energy Equipment, LOTVACUUM, Taiko Kikai Industries, Busch Vacuum, EVP Vacuum Technology, Scroll Laboratories, Inc, ULVAC, Inc, Highvac Corporation, Osaka Vacuum, Ltd

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