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EUV Lithography Market 2025-2032: Forecast, Innovations & Investment Outlook | Top 5 Companies are Taiwan Semiconductor Manufacturing Company Limited (TSMC), Vistec Semiconductor Systems, NuFlare Technology Inc, Intel Corporation, Nikon Corporation
EUV Lithography Market
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United States: Recent Industry Developments
✅ October 2025: Intel accelerated deployment of high-NA EUV tools to boost next-gen chip manufacturing at its U.S. fabs.
✅ September 2025: IBM advanced research on EUV-driven sub-2nm process technologies through expanded semiconductor R&D partnerships.
✅ August 2025: U.S. chip manufacturers increased investments in EUV mask development infrastructure to improve yield and pattern accuracy.
Japan: Recent Industry Developments
✅ October 2025: Tokyo Electron introduced upgraded EUV resist processing equipment designed for ultra-fine patterning at advanced nodes.
✅ September 2025: Japan's semiconductor ecosystem intensified collaboration on EUV pellicle development to support global chipmakers.
✅ August 2025: Rapid progress in metrology and inspection tools strengthened Japan's capabilities in EUV defect detection and mask quality control.
Latest M&A
While direct M&A in EUV lithography specifics is limited, chipmakers like Samsung, SK Hynix, and Intel continue deepening partnerships with ASML Holding , the sole supplier of EUV systems globally, to secure supply and develop new generations of EUV tools.
Key Players:
ASML, Canon Inc., Intel Corporation, Nikon Corporation, NuFlare Technology Inc., Samsung Corporation, SUSS Microtec AG, Taiwan Semiconductor Manufacturing Company Limited (TSMC), Ultratech Inc., Vistec Semiconductor Systems
Latest News
China's semiconductor industry revealed a prototype desktop-sized EUV light source capable of producing 14 nm chips with plans for scaled production in 2026, presenting a direct challenge to ASML's dominance in high-end lithography.
ASML opened a new EUV machine training center in Phoenix, Arizona to train over 1,000 engineers annually, addressing talent and operational expertise gaps in advanced chip manufacturing.
Japan's Hokkaido Rapidus fab project recently received its first EUV system from ASML, marking a significant milestone in Japan's drive to reenter the cutting-edge chipmaking race.
Growth Forecast Projection:
The Global EUV Lithography Market is anticipated to rise at a considerable rate during the forecast period, between 2025 and 2032. In 2024, the market is growing at a steady rate, and with the rising adoption of strategies by key players, the market is expected to rise over the projected horizon.
Research Process:
Both primary and secondary data sources have been used in the global EUV Lithography Market research report. During the research process, a wide range of industry-affecting factors are examined, including governmental regulations, market conditions, competitive levels, historical data, market situation, technological advancements, upcoming developments, in related businesses, as well as market volatility, prospects, potential barriers, and challenges.
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Key Segmentation:
By Light Source: (Laser Produced Plasma, Vacuum Sparks, Gas Discharges)
By Application: (Integrated Device Manufacturer, Foundry)
By Equipment: (Light Source, Mirrors, Masks, Others)
Regional Analysis for Market:
⇥ North America (U.S., Canada, Mexico)
⇥ Europe (U.K., Italy, Germany, Russia, France, Spain, The Netherlands and Rest of Europe)
⇥ Asia-Pacific (India, Japan, China, South Korea, Australia, Indonesia Rest of Asia Pacific)
⇥ South America (Colombia, Brazil, Argentina, Rest of South America)
⇥ Middle East & Africa (Saudi Arabia, U.A.E., South Africa, Rest of Middle East & Africa)
Benefits of the Report:
Chapter 1: Sets the stage by outlining the report's coverage, summarizing key market segments by region, product type, and application. Presents a snapshot of market sizes, growth potential across segments, and anticipated industry evolution both short and long term.
Chapter 2: Highlights pivotal market insights and uncovers the most significant emerging trends driving change within the industry.
Chapter 3: Offers an in-depth look at the competitive landscape among EUV Lithography producers, including revenue shares, strategic moves, and recent mergers and acquisitions.
Chapter 4: Presents comprehensive profiles of the market's key players, delving into details such as revenue, profit margins, product portfolios, and company milestones.
Chapters 5 & 6: Analyze EUV Lithography revenue at both regional and country levels, providing quantitative breakdowns of market sizes, growth opportunities, and development prospects worldwide.
Chapter 7: Focuses on different market segments by type, examining their individual sizes and potential, guiding readers toward high-impact, untapped market areas.
Chapter 8: Explores segmentation by application, evaluating industry growth potential in various downstream markets and pinpointing promising sectors for expansion.
Chapter 9: Provides a thorough review of the industry's supply chain mapping out both upstream and downstream activities.
Chapter 10: Concludes with a summary of the report's key findings and highlights the most critical takeaways for industry stakeholders.
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Latest Product Launches
ASML's EXE system, their high numerical aperture (NA) EUV lithography platform, offers superior resolution and throughput targeting sub-2 nm logic and advanced DRAM nodes. The first High NA EUV tool was installed in late 2023 and is expected to ramp production volumes in 2025-26
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Latest Investments
TSMC plans to invest over $12.3 billion in 2025 for EUV capacity expansions to support 2 nm process node development, ordering 30-35 EUV machines this year and next to meet demand for AI and 5G chips.
China invested €37 billion to develop domestic EUV lithography systems aiming to break the monopoly of ASML, with key players including Huawei and Shanghai Micro Electronics Equipment (SMEE) advancing research and patents.
Project Hubs
The United States (Arizona), Japan (Hokkaido), South Korea, China, and Europe represent key hubs for EUV lithography deployment, manufacturing tool installations, talent development centers, and research collaborations supporting next-gen semiconductor production.
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DataM Intelligence is a Market Research and Consulting firm that provides end-to-end business solutions to organizations from Research to Consulting. We, at DataM Intelligence, leverage our top trademark trends, insights and developments to emancipate swift and astute solutions to clients like you. We encompass a multitude of syndicate reports and customized reports with a robust methodology.
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