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Future of the Dry Etching Equipment Market: Trends, Innovations, and Key Forecasts Through 2034

09-23-2025 08:49 AM CET | Industry, Real Estate & Construction

Press release from: The Business Research Company

Dry Etching Equipment Market

Dry Etching Equipment Market

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Dry Etching Equipment Market Size Growth Forecast: What to Expect by 2025?
In recent times, the size of the dry etching equipment market has seen robust growth. It is set to increase from a market size of $11.02 billion in 2024 to $11.94 billion in 2025, demonstrating a compound annual growth rate (CAGR) of 8.4%. The growth during the historical period is due to a heightened demand for compact electronic devices, the widespread usage of semiconductors in consumer electronics, expanding production of integrated circuits, increased investments in foundry facilities, and the rise in the implementation of automation in fabrication.

How Will the Dry Etching Equipment Market Size Evolve and Grow by 2029?
The market size of dry etching equipment is anticipated to witness significant growth in the ensuing years, estimated to rise to $16.24 billion in 2029 with a compound annual growth rate (CAGR) of 8.0%. This projected growth during the forecast period can be credited to the expanding usage of 3D NAND and FinFET technologies, the escalating demand for superior node chips, the mounting requirement for high-caliber computing devices, burgeoning investment in memory chip manufacturing, and growing demand for wearable electronics. Key trends during the forecast period include advancements in plasma etching methodologies, innovative strides in atomic layer etching systems, invested research and development for etching tools below 5nm, progress in dry etching for heterogeneous integration and innovative strides in AI-powered process control systems.

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What Drivers Are Propelling the Growth of Dry Etching Equipment Market Forward?
The growth of the market is being propelled by the escalating demand for semiconductor devices, which is a result of the expanding consumer electronics industry.

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What Long-Term Trends Will Define the Future of the Dry Etching Equipment Market?
Leading firms in the dry etching equipment market are concentrating on the innovation of superior solutions such as plasma etching-based instruments to boost precision, scalability, and effectiveness in semiconductor creation. Plasma etching-based apparatuses are semiconductor production tools that utilize ionized gases to eliminate materials from a base, resulting in meticulous and controlled etching of micro-scale structures and designs. For example, in November 2024, Hitachi High-Technologies Corporation, a technology firm from Japan, introduced the DCR Etch System 9060 Series. It is engineered for exact isotropic (horizontal) etching at the molecular layer level. The system employs plasma etching technology, assisting in the creation of cutting-edge three-dimensional semiconductor devices like 3D-NAND and 3D-DRAM structures. It offers high-throughput processing and a compact machine footprint through a unique wafer-cooling feature that's matched with an infrared lamp for speedy alternation of wafer temperatures. This facilitates atomic-level command over wafer design shapes, an essential aspect in fabricating complex 3D semiconductor frameworks. Moreover, the system is compatible with both R&D and mass production, thereby reducing development time, cutting costs, and increasing productivity in semiconductor production.

What Are the Key Segments in the Dry Etching Equipment Market?
The dry etching equipment market covered in this report is segmented

1) By Type: Inductively Coupled Plasma Etching, Capacitive Coupled Plasma Etching, Reactive Ion Etching, Deep Reactive Ion Etching, Others Types
2) By Component Type: Etch Chambers, Gas Control Systems, Power Supplies, Cooling Systems, Software And Control Systems
3) By Equipment Type: Batch Etchers, Single Wafer Etchers, High Volume Production Etchers, Modular Etching Systems, Etch Tools With Advanced Automation
4) By Application: Semiconductor Manufacturing, Micro-Electro-Mechanical Systems, Light Emitting Diode Production, Other Applications
5) By End-User: Electronics, Automotive, Aerospace, Healthcare, Other End-Users

Subsegments:
1) By Inductively Coupled Plasma Etching: High Density Plasma Systems, Low Pressure Plasma Systems, Advanced Wafer Etching Systems
2) By Capacitive Coupled Plasma Etching: Parallel Plate Plasma Etching Systems, Medium Frequency Plasma Systems, Single Wafer Processing Systems
3) By Reactive Ion Etching: Parallel Plate Reactive Ion Etching Systems, High Selectivity Etching Systems, Low Damage Etching Systems
4) By Deep Reactive Ion Etching: Bosch Process Etching Systems, Cryogenic Process Etching Systems, High Aspect Ratio Etching Systems
5) By Others Types: Microwave Plasma Etching Systems, Neutral Beam Etching Systems, Atomic Layer Etching Systems

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Who Are the Key Players Shaping the Dry Etching Equipment Market's Competitive Landscape?
Major companies operating in the dry etching equipment market are Panasonic Corporation, Applied Materials Inc., Lam Research Corporation, Tokyo Electron Limited, KLA Corporation, Hitachi High-Technologies Corporation, NAURA Technology Group Co. Ltd., DISCO Corporation, Advanced Energy Industries Inc., ULVAC Inc., Advanced Micro-Fabrication Equipment Inc., Oxford Instruments plc, Shibaura Mechatronics Corporation, GigaLane Co. Ltd., Plasma-Therm LLC, Samco Inc., SENTECH Instruments GmbH, Plasma Etch Inc., Nano-Master Inc., PVA TePla AG.

What Geographic Markets Are Powering Growth in the Dry Etching Equipment Market?
Asia-Pacific was the largest region in the dry etching equipment market in 2024. Asia-Pacific is expected to be the fastest-growing region in the forecast period. The regions covered in dry etching equipment report are Asia-Pacific, Western Europe, Eastern Europe, North America, South America, Middle East and Africa.

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3.Policy Makers & Regulators - To track industry developments and align regulatory frameworks.
4.Consultants & Analysts - To support market entry, expansion strategies, and client advisory work.

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With over 15,000+ reports from 27 industries covering 60+ geographies, The Business Research Company has built a reputation for offering comprehensive, data-rich research and insights. Our flagship product, the Global Market Model delivers comprehensive and updated forecasts to support informed decision-making.

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