Press release
Newport’s New, Integrated Vertical and Rotation Stage for Wafer Positioning
Newport’s ZVR features a compact and rigid design with improved cantilevered load capacity. With significantly lower cross-talk than earlier designs, the new stage delivers higher dynamic system performance in a very low-profile footprint. The low mass, along with a high natural frequency, accommodates a variety of rapid step-and-settle positioning applications.
The ZVR vertical platform has a wide, 3-point base with a stepper-motor-driven 10 mm Z-stage. The integrated stainless steel rotation stage features smooth operation utilizing stainless steel ball bearings. It is available in two models, the ZVR-PP with a stepper motor or the ZVR-PC with a servo-driven DC motor. Both rotation stages provide continuous 360-degree rotation for angular travel. An optional linear encoder for the Z-stage or the Z-stage without the rotation stage, are also available.
The highly-stable, three-point bottom interface permits mounting to any XY stage or other platform. A large, clear aperture through the center of the stage simplifies electrical cable and vacuum-chuck cable/hose management. For added convenience, all electrical and vacuum chuck utility connections are found at a single location.
Newport Corporation is a leading global supplier of advanced-technology products and systems to customers in the scientific research, microelectronics manufacturing, aerospace and defense/security, life and health sciences and precision industrial manufacturing markets. Newport’s innovative solutions leverage its expertise in high-power semiconductor, solid-state and ultrafast lasers, photonics instrumentation, sub-micron positioning systems, vibration isolation, optical subsystems and precision automation to enhance the capabilities and productivity of its customers’ manufacturing, engineering and research applications. Newport is part of the Standard & Poor’s SmallCap 600 Index and the Russell 2000 Index.
Newport Corporation
1791 Deere Avenue
Irvine, CA 92606
Tel 949-863-3144
Fax 949-253-1800
www.newport.com
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